受託分析｜ユーロフィンEAG Product Lineup

TEM/STEM is an analytical method that uses an electron beam to image samples. The spatial resolution of TEM/STEM is approximately 1 to 2 Å. High-energy electrons (80 to 200 keV) can penetrate electron-transparent samples (up to about 100 nm thick). While the spatial resolution of TEM/STEM is superior to that of SEM, it often requires complex sample preparation. Additionally, in recent years, the introduction of AC-STEM (STEM with spherical aberration-corrected lenses) has enabled higher resolution analysis compared to conventional STEM. EAG Laboratories owns more than 20 TEM/STEM instruments and over 30 FIB-SEM systems for sample preparation. We also have multiple EDS/EELS systems for elemental analysis. With a sufficient number of facilities for analysis, we can always respond to TEM/STEM analysis requests with short turnaround times (standard delivery: 6 to 8 business days / expedited delivery: upon inquiry).

• Electron microscope
• Contract Analysis
• Contract measurement

GDMS (Glow Discharge Mass Spectrometry) is a method suitable for the evaluation of trace impurities (ppm-ppb wt) and can simultaneously measure almost all elements with stable isotopes on the periodic table, excluding gas components (*). Samples with conductivity are preferred, but EAG Laboratories possesses technology that can stably measure not only conductive samples but also semiconductors and insulators, allowing for impurity analysis in oxides, nitrides, and carbides.

• Contract Analysis
• Contract measurement
• Mass Spectrometer

PCOR-SIMS (Point by point Corrected SIMS) is an analytical method uniquely developed by EAG Laboratories based on SIMS, leveraging years of experience and expertise. It corrects the sensitivity coefficients and sputtering rates for all points in the depth direction in response to changes in the sample matrix, enabling the acquisition of highly accurate depth profiles. PCOR-SIMS is effective for evaluating trace elements and compositions in compound semiconductors, as well as for assessing ultra-shallow ion implantation distributions of elements such as B, As, and P.

• Contract Analysis
• Secondary ion mass spectrometer
• Ion implantation equipment

Smart CHART is a chart designed by EAG that clearly shows the relationship between various surface analysis methods, their analysis areas, and detection limits at a glance. It provides an overview of surface analysis techniques, making it useful as a reference when wanting to know about different methods or when selecting an analysis technique. ● Free Basic Analysis Seminar We are offering a free online basic analysis seminar based on the analysis methods available in Smart CHART. In the basic analysis seminar, we will clearly explain the principles and characteristics of each analysis method, as well as the analysis results obtained from each technique. Additionally, we also offer free application seminars for analysis methods such as TEM/STEM (Transmission Electron Microscopy), SIMS (Secondary Ion Mass Spectrometry), and PCOR-SIMS (Point by point Corrected Secondary Ion Mass Spectrometry). The seminars are arranged individually for each customer. Please feel free to contact us if you wish to hold a seminar.

• Contract Analysis
• Contract Inspection
• Contract measurement