GDMS is a method suitable for evaluating trace impurities (ppm-ppb wt) and can simultaneously measure almost all elements except for gas components with stable isotopes.
GDMS (Glow Discharge Mass Spectrometry) is a method suitable for the evaluation of trace impurities (ppm-ppb wt) and can simultaneously measure almost all elements with stable isotopes on the periodic table, excluding gas components (*). Samples with conductivity are preferred, but EAG Laboratories possesses technology that can stably measure not only conductive samples but also semiconductors and insulators, allowing for impurity analysis in oxides, nitrides, and carbides.
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basic information
Using glow discharge with solid samples as the cathode, the sample surface is sputtered, and the released neutral particles are ionized through collisions with Ar or electrons in the plasma for analysis. - Measurement of most elements (Li-U) with stable isotopes on the periodic table is possible. - Measurements at ppb-% levels are possible for many elements. - The matrix effect is small, allowing for semi-quantitative analysis close to quantitative analysis even for unknown materials without standard samples. - Direct measurement is possible in various forms such as powders, wires, and thin films by using auxiliary materials. - By ensuring conductivity, direct measurement is possible even for semiconductor materials and insulators.
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Applications/Examples of results
- High purity metals - Alloys - Carbon and graphite products - Various semiconductor materials, power devices - Raw materials for secondary battery cathode materials - Ceramics such as oxides, carbides, nitrides, and sulfides - Silicon for solar cells - Rare metals and rare earths - Unknown materials with uncertain main components
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If you are having trouble with material analysis, please feel free to consult EAG! ● High-quality analysis ● Short delivery time ● Quick response Eurofins EAG (abbreviated as EAG) has been providing material analysis services for over 40 years in the semiconductor industry, high-purity metals, and advanced/nano materials fields. We respond to customer needs with our long-standing technical expertise and quick delivery in SIMS analysis (Secondary Ion Mass Spectrometry), which is essential for process development, research and development, and quality assurance of semiconductor devices and manufacturing equipment, as well as TEM/STEM analysis (Transmission Electron Microscopy) and GDMS analysis (Glow Discharge Mass Spectrometry) used for impurity analysis of high-purity materials.