High-precision positioning small magnetic sensor for semiconductor manufacturing
Small magnetic sensors, magnetic switches HA-120, HS-120 MACOME Makome Research Institute
A compact magnetic sensor with a repeatability accuracy of ±0.1μm. Contributes to precise position control.
In the semiconductor manufacturing industry, high-precision control in the positioning of wafers and substrates is essential due to the advancement of manufacturing processes. Particularly in fine processing and assembly stages, even slight misalignments can significantly impact product quality and yield. Our high-precision positioning small magnetic sensor HA-120 and switch HS-120 achieve a repeatability accuracy of ±0.1μm, enabling precise position control in semiconductor manufacturing. 【Application Scenarios】 - Position detection in wafer transport equipment - Stage position control in exposure equipment - Positioning in bonding equipment - Precise alignment in inspection equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased efficiency in manufacturing processes - Enhanced performance of equipment
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basic information
【Features】 - High-precision detection of the center of the origin position of precision moving bodies, etc. - Less susceptible to dirt and dust due to the detection of magnetic bodies - The detection head is small in diameter (φ3mm×16.5mm), allowing for flexible installation - DC voltage output (HA-120), NPN/PNP transistor output types (HS-120/HS-121) 【Our Strengths】 Utilizing our original technology of saturable coils, we provide a fundamentally simple magnetic detection element technology that remains highly accurate and stable for long periods even under adverse conditions. All products are developed and manufactured 100% in Japan, with over 80% of our product lineup being custom-made based on individual customer requests. If you have any issues with sensing or measurement, please feel free to consult us. Our standard products come with a reassuring 3-year warranty.
Price information
Please contact us.
Price range
P2
Delivery Time
P3
※The delivery time may vary depending on the quantity, so please feel free to contact us.
Applications/Examples of results
High-precision moving table origin detection Machining center origin detection Optical equipment positioning
Line up（9）
| Model number | overview |
|---|---|
| HA-120 | DC voltage output |
| HS-120-N | Switching output NPN transistor output type N-pole |
| HS-120-S | Switching output NPN transistor output type S pole |
| HS-121-N | Switching output PNP transistor output type N pole |
| HS-121-S | Switching output PNP transistor output type S pole |
| MG-210 | Magnetizer |
| MG-210B | Magnetizer |
| MG-220 | Magnetizer |
| D-4 | Head holder |
catalog（3）
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CAD data（12）
| Model number | overview | File |
|---|---|---|
| HA-120 | High-precision positioning sensor |
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| HA-120 | High-precision positioning sensor |
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| HS-120 | High-precision positioning sensor Φ3 NPN output |
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| HS-120 | High-precision positioning sensor Φ3 NPN output |
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| HS-121 | High-precision positioning sensor Φ3 PNP output |
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| HS-121 | High-precision positioning sensor Φ3 PNP output |
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| MG-210 | Magnetizing device for LS and FS |
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| MG-210 | Magnetizing device for LS and FS |
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| MG-220 | Magnetizing device for LS and FS |
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| MG-220 | Magnetizing device for LS and FS |
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| D-4 | Head holder for HA-120 and HS-120 series. |
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| D-4 | Head holder for HA-120 and HS-120 series. |
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Company information
Utilizing our original technology of saturable coils, we offer a fundamentally simple magnetic detection element technology that provides high precision and long-term stability even under adverse conditions. We have received strong support from a wide range of industries, including unmanned transport carts, industrial equipment, labor-saving machines, material handling, machine tools, injection molding machines, civil engineering and construction robots, food machinery, industrial machinery, nuclear facilities, and ships. We also excel in sensors for motorsports such as F1 and Moto GP, tilt meters for construction machinery, and magnetic sensors used for ultra-high precision measurements in scientific fields. Some of our products are also used in applications like multi-story parking and golf cart guidance sensors. All of our products are developed and manufactured 100% in Japan, with over 80% of our product lineup being custom-made based on individual customer requests. We have many custom options available, including waterproof, explosion-proof, heat-resistant, water-resistant, and radiation-resistant specifications. If you have any issues related to sensing or measurement, please feel free to consult us. IoT Platform: Our sales and technical staff are fully committed to addressing everything from minor customizations of existing products to proposing new detection principles. You can also rely on us for assistance with improvements. Our standard products come with a reassuring 3-year warranty. Location: Ina, Nagano Prefecture. Published on Ipros Monozukuri.
