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  6. Vibration Controller & Data Collection System for Semiconductor Manufacturing Monitoring

Vibration Controller & Data Collection System for Semiconductor Manufacturing Monitoring

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RL-C21

last updated:Dec 24, 2025

シスコム(SysCom)
シスコム(SysCom)
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The RL-C21 is a versatile device that can be easily upgraded.

In the semiconductor manufacturing industry, it is important to detect subtle vibrations and anomalies in the manufacturing process early to maintain product quality. Vibrations on the production line can not only reduce product yield but also lead to equipment failures. The RL-C21 is equipped with up to 32 channels of input and 8 channels of output, supporting multi-point monitoring. Its high-level vibrator protection function prevents damage to the vibrator and supports a stable manufacturing environment. 【Use Cases】 - Vibration monitoring in semiconductor manufacturing lines - Anomaly detection in manufacturing equipment - Product quality management 【Benefits of Implementation】 - Stabilization of the manufacturing process - Improvement of product yield - Extension of equipment lifespan

    Vibration Testing
DSC_0611_2.png

Vibration Controller & Data Collection System for Semiconductor Manufacturing Monitoring

DSC_0611_2.png
DSC_0611_2.png 19_thumb_5d933e056ba1f.png 35_thumb_5da7034286aca.png 42_thumb_5da7039887d58.png 37_thumb_5da7035ba9ff2.png
  • Related Link - https://syscom-corp.jp/products/rl-c21/
  • Special site - Product/service details - https://pr.mono.ipros.com/syscom/product/

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【Features】 - Flexible configuration allows for customization tailored to the user's testing requirements. - Connect up to 8 devices in a single network, achieving up to 32 channels of input and 8 channels of output. - Protection for high-level actuators through built-in DSP in the controller. - Control of up to 8 two-axis and three-axis actuators, as well as six-axis actuators simultaneously, enabled by MEMS & MIMO performance. - Damage prevention through galvanic isolation of the input chain. 【Our Strengths】 We provide and support a unique range of sensors, measuring instruments, and their application products both domestically and internationally with reliable technology. We will continue to offer flexible and dependable technical support to meet our customers' diverse needs.

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◎Application Examples ・ Vibration testing of aircraft, automobiles, communication devices, and industrial equipment ・ Continuous vibration testing on manufacturing lines ・ Research and development ・ Fatigue testing

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Small vibrator (inertial type)

Small vibrator (inertial type)

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シスコム(SysCom)

シスコム(SysCom)

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We will contribute to research and development in various fields by introducing analysis and evaluation equipment and sensor systems based on cutting-edge technology from Europe and the United States to the domestic market. Additionally, we will provide flexible and reliable technical support to meet our customers' diverse needs. Please feel free to consult us, even about minor matters.

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