Alkaline liquid compatible TSP pump BS model for semiconductors
Solenoid-driven quantitative diaphragm pump TSP series BS type
Diaphragm pumps optimal for chemical supply in semiconductor manufacturing.
In the semiconductor industry, the precise supply of chemicals in the manufacturing process is a crucial factor that affects product quality and yield. In particular, alkaline chemicals are highly corrosive, requiring pumps with high chemical resistance. Additionally, the ability to accurately inject small amounts of chemicals is essential. Our alkaline liquid-compatible TSP pump BS model uses materials with excellent corrosion resistance and achieves precise chemical supply, contributing to solving challenges in semiconductor manufacturing. 【Usage Scenarios】 - Chemical supply in semiconductor manufacturing processes - Situations requiring precise micro-injection of chemicals - Handling of alkaline chemicals 【Benefits of Implementation】 - Improved accuracy of chemical supply - Stabilization of product quality - Reduction of running costs
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basic information
**Features** - A corrosion-resistant resin pump capable of transferring various chemicals. - Adopts a solenoid drive system ideal for accurately dispensing small quantities. - Waterproof performance equivalent to IP65, suitable for outdoor use. - Compatible with power supplies ranging from 100 to 240V. - Features a user-friendly digital display. **Our Strengths** We manufacture and sell industrial equipment and urea water production systems, allowing us to propose products tailored to our customers' needs.
Price information
Reference price TSP-60,100,200-BS-S: ¥80,000
Delivery Time
Applications/Examples of results
A corrosion-resistant resin pump capable of transferring various chemicals. Ideal for accurately delivering small amounts using a solenoid drive system.
Line up(3)
| Model number | overview |
|---|---|
| TSP-60-BS-S | Maximum discharge volume: 60 mL/min Maximum discharge pressure: 1 MPa Rated voltage: AC 100V to 240V single phase Frequency: 50/60 Hz Transfer liquid temperature: 0 to 40℃ (must not freeze) Material: (liquid contact part) PVC / (diaphragm) PTFE / (packing) EPDM Weight: 2.8 kg Connection size (discharge side / suction side) Φ6 × Φ11 Stroke count: 1 to 200 times/min Stroke length: 0.0 to 1.0 mm Transferable viscosity: 100 mPa·s |
| TSP-100-BS-S | Maximum discharge volume: 100 mL/min Maximum discharge pressure: 1 MPa Rated voltage: AC 100V to 240V single phase Frequency: 50/60 Hz Transfer liquid temperature: 0 to 40℃ (must not freeze) Material: (contact part) PVC / (diaphragm) PTFE / (packing) EPDM Weight: 2.8 kg Connection size (discharge side/suction side): Φ6 × Φ11 Stroke count: 1 to 200 times/min Stroke length: 0.0 to 1.0 mm Transferable viscosity: 100 mPa·s |
| TSP-200-BS-S | Maximum discharge volume: 200 mL/min Maximum discharge pressure: 0.35 MPa Rated voltage: AC 100V to 240V single phase Frequency: 50/60 Hz Transfer liquid temperature: 0 to 40℃ (must not freeze) Material: (liquid contact part) PVC / (diaphragm) PTFE / (packing) EPDM Weight: 2.8 kg Connection size (discharge side/suction side) Φ6×Φ11 Stroke count: 1 to 200 times/min Stroke length: 0.0 to 1.0 mm Transferable viscosity: 100 mPa·s |
catalog(5)
Download All CatalogsCompany information
We are engaged in the manufacturing and sales of industrial machinery and urea water production equipment.







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