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  6. FEP/PFA coated O-ring for semiconductors

FEP/PFA coated O-ring for semiconductors

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last updated:Jan 14, 2026

MO tech Co.,Ltd. Office and warehouse
MO tech Co.,Ltd. Office and warehouse
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FEP/PFA coated O-rings with excellent chemical resistance and heat resistance.

In the semiconductor manufacturing industry, high resistance to chemicals and cleaning solutions is required. These chemicals can degrade sealing materials such as O-rings, potentially causing leaks and contamination. FEP/PFA coated O-rings exhibit excellent chemical resistance due to their fluoropolymer coating, enhancing reliability in semiconductor manufacturing processes. 【Application Scenarios】 - Equipment using chemicals - Cleaning processes - Cleanroom environments 【Benefits of Implementation】 - Suppression of degradation due to chemicals - Reduction of risks related to leaks and contamination - Improved equipment operating rates

    AutoclaveSterilizerChemicals
PFA

FEP/PFA coated O-ring for semiconductors

PFA O-Ring.png
PFA O-Ring.png
  • Related Link - http://mo-tech.jp/product_infomation.html
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【Features】 - O-rings made of fluororubber and silicone rubber coated with FEP or PFA - Excellent chemical resistance - Wide operating temperature range from -60°C to 260°C - Special sizes can be accommodated with relatively short lead times - Inner diameter can be set arbitrarily 【Our Strengths】 M.O. Tech Co., Ltd. is a specialized trading company for sealing systems. With years of experience, reliability as an authorized distributor of Hallite and Petseals, and collaboration with multiple suppliers, we provide high-quality products at low costs. In addition to selling products from stock, we also offer technical support to contribute to solving our customers' challenges.

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Applications/Examples of results

◇ Filter ◇ Pump ◇ Mechanical Seal ◇ Heat Exchanger ◇ Gas Compressor ◇ Hose Coupling Seal ◇ Tank Lid ◇ Paint and Coating Equipment ◇ Centrifuge Bolts and Tubes ◇ Sanitary Equipment ◇ Food Machinery ◇ Refrigeration and Freezing Equipment ◇ Crude Oil Transport Equipment ◇ Chemical Machinery ◇ Aerospace Equipment ◇ Semiconductor Equipment ◇ Various Physical and Chemical Instruments ◇ Semiconductor Equipment etc.

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M.O. Tech Co., Ltd. is a specialized trading company for sealing systems. We are the only officially certified sales company in Japan for Hallite, which has been supplying high-performance seals to the world for over a century, and Petseals, known for its high quality. Additionally, leveraging our extensive experience and collaboration with excellent suppliers, we propose sealing systems and related products that offer superior quality at low costs. Our company not only sells products from stock but also focuses on proposing sealing systems for new development products and suggestions for improving defects, supported by our experienced staff.

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