Ultra Fine Leak Test System for Semiconductors
Ultra-micro leakage Fine leak test Vacuum chamber method Ultra-fine leak test Capsule accumulation method
Detecting micro leaks in small electronic components! High-sensitivity leak testing.
In the semiconductor industry, detecting minute leaks is crucial to ensure the long-term reliability of products. Particularly in MEMS components and small electronic parts, it is essential to maintain the sealing integrity within the product and prevent external influences. Minute leaks can lead to performance degradation or failure of the product, potentially resulting in decreased yield. The MUH-0100 series employs the "capsule accumulation method," capable of measuring up to 4×10⁻¹⁵Pa·m³/s (He), to detect ultra-small helium leaks, thereby contributing to the improvement of semiconductor product quality. 【Application Scenarios】 - MEMS components such as angular velocity sensors and infrared image sensors - Small electronic components 【Benefits of Implementation】 - Improved product reliability - Enhanced yield - Strengthened quality control
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**Features** - Capable of measuring up to 4×10⁻¹⁵ Pa·m³/s (He) - Significantly reduces background noise - Capable of detecting ultra-small helium leaks - Reduces the influence of gases other than helium that can cause errors - Eliminates the need for heaters and ultra-low temperature pumps, with startup time maintenance comparable to conventional helium leak detectors **Our Strengths** With 60 years of pursuing leak detection, we are committed to the future of leak testing. We support various leak tests: air leak tests / gas leak tests (hydrogen gas and helium gas). We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing performance. ISO 9001 certified.
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【Inspection Target Examples】 ■MEMS Components (Pressure Sensors, Acceleration Sensors, Angular Velocity Sensors, Infrared Image Sensors) ■Electronic Components ■Hermetic Packages ■Crystal Devices etc. *For more details, please refer to the PDF document or feel free to contact us.
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【 Various Leak Testing Solutions: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing performance. We will propose appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the "optimal leak tester" for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015) Head Office Address: 3-16-5 Nukui, Nerima-ku, Tokyo (Postal Code: 176-0021) Phone Number: 03-3577-1111 (Main)