FMS-FC 1.400 Flow Control Pump for Semiconductor Etching
FMS-FC 1.400 METERING PUMP WITH FLOW CONTROL
Optimize the etching process with flow control.
In the etching process of semiconductor manufacturing, precise flow control of the chemical solution is essential. Uniform etching treatment is a crucial factor that affects product quality and yield, and even slight variations in flow can lead to the occurrence of defective products. The FMS-FC 1.400 metering pump with flow control provides stable flow through closed-loop control, contributing to improved accuracy in the etching process. [Application Scenarios] - Etching process of semiconductor wafers - Flow control in chemical supply systems - Integration into etching equipment [Benefits of Implementation] - Improved etching quality due to stable flow supply - Increased product yield - Enhanced reproducibility of the process
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basic information
**Features** - Stable liquid flow through closed-loop control - Consistent flow rate throughout product life - Stability against liquid temperature changes - Stability against system pressure fluctuations - Configurable output parameters - Fault/bubble detection function - Flexible communication interface - Easy system integration - Basic flow rate 800 - 3400 ml/min - Suction lift 3 mH2O - Corrosion-resistant specifications PTFE / FKM / FFKM - Pump head material PPS - KNF-developed brushless DC motor specifically for the pump **Our Strengths** KNF is a company specialized in the development, design, manufacturing, and sales of diaphragm pumps and gas/liquid handling systems. We provide customer-oriented solutions to address challenges and have established our position globally.
Price range
P3
Delivery Time
※Made-to-order production requires prior technical meetings.
Applications/Examples of results
Typical application areas: • Cleaning and disinfection • Medical diagnostics • Industrial measurement systems • Laboratory equipment • Printing (inkjet) • Chemical industry
Line up（1）
| Model number | overview |
|---|---|
| FMS-FC 1.400 METERING PUMP WITH FLOW CONTROL | Diaphragm liquid pump |
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Company information
KNF was founded by Kurt Neuberger in 1946 in Freiburg, Germany (Freiburg im Breisgau). Since then, we have been a family-owned independent company providing our customers with security and stability. Over the years, we have achieved steady growth and expanded our business globally while accumulating experience. Currently, with 17 subsidiaries worldwide, we continue to deepen our expertise in various industries and advance the expansion of product applications. As a company specializing in the development, design, manufacturing, and sales of diaphragm pumps and gas and liquid handling systems, we have established our position globally as a provider of customer-oriented solutions to address challenges. Innovation means having an open attitude towards new approaches and various methods, and appropriately judging and identifying what will be needed for the future. By bringing together expertise from various engineering fields, including mechanical engineering, materials, fluid engineering, electronics, and software, we strive to find optimal and smart solutions for all applications, not only for our customers' current needs but also for their future requirements.
![[FMS-FC 1.400 Flow Control Pump for the Oil Industry]](https://image.mono.ipros.com/public/product/image/308317/IPROS11392409837640454595.jpg?w=280&h=280)
