Maximizing the operating time of advanced semiconductor manufacturing processes.
Isolast PureFab, developed for harsh semiconductor manufacturing processes, is a sealing material that achieves the highest level of purity. Trelleborg Sealing Solutions has developed the highest level of materials in the Isolast PureFab series for harsh semiconductor manufacturing processes. By using these perfluoroelastomer (FFKM) materials, it is possible to improve the yield of semiconductor manufacturing processes and reduce process defects. As a result, downtime is minimized, maintenance cycles are extended, and the operating time of process tools is improved, enhancing the total cost of ownership (TCO). All semiconductor materials in the "PureFab" line possess excellent mechanical properties while achieving the highest level of purity without compromising plasma resistance, outgassing, or thermal stability. Each material exhibits the highest level of characteristics in its individual grade.
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【Company Overview】 Trelleborg Sealing Solutions (TSS), a subsidiary of the Trelleborg Group, which has been leading the global polymer products sector through innovation and new product development for over a century, is the Japanese entity of the company. It has over 60 sales locations worldwide, 11 R&D centers, 36 manufacturing sites, and 7 logistics centers. We offer a wide range of products, including high-performance PTFE seals for general industry and automotive applications, mass-produced elastomer seals, airframe and engine seals for the aerospace sector, as well as liquid silicone products and silicone tubes for the healthcare and medical fields, all made from over 2,000 unique materials.
