A transport system compatible with clean environments that improves the quality and efficiency of semiconductor manufacturing.
In the semiconductor industry, transporting products in a clean environment is essential to prevent the contamination of fine foreign substances that can affect product quality. Precise positioning and stable transport performance are also required. The Excel series addresses these challenges and contributes to improving yield in the semiconductor manufacturing process. 【Usage Scenarios】 - Transporting wafers, substrates, and components in clean rooms - Smooth movement between processes on the manufacturing line - Accurate positioning for inspection equipment 【Benefits of Implementation】 - Improved quality by reducing the risk of foreign substance contamination - Increased productivity by shortening transport time - Enhanced efficiency of the manufacturing line through space-saving solutions
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【Features】 - Compatible with clean environments of cleanliness class 10 or lower - Static voltage of 5V or lower, energy-saving design - Diverse lineup including modular split types and accumulative types - Options tailored to the characteristics of transported items, such as magnetic drive and gear drive 【Our Strengths】 Okamura Corporation's Logistics Systems Division pursues the rationalization of logistics and continuously develops and provides new logistics system equipment through practical implementation. We offer comprehensive support from proposals for improving logistics systems to software development, equipment installation, operational support, and after-sales service.
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Okamura Corporation's Logistics System Division pursues the rationalization of logistics and continuously develops and provides new logistics system equipment through practical application. We offer comprehensive support from proposals for improving logistics systems to achieve "faster," "more accurate," and "safer" logistics operations, to software development, equipment installation, operational support, and after-sales service, all aimed at generating management benefits.
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