Bernoulli chuck for non-contact transfer of high-temperature workpieces.
This product is manufactured according to the usage environment temperature and chemical specifications. The quartz glass used in ultra-high temperature applications possesses numerous characteristics, such as high purity, resistance to heat and acid, and high mechanical strength. It has become possible to transport wafers non-contact in cleaning tanks, oxidation diffusion furnaces, etching devices, CVD devices, etc., in the semiconductor manufacturing process, as well as non-contact transport of glass molding lenses. Additionally, products are made to suit various environments, including aluminum, SUS, PEEK, and others.
◎ Features
1. Heat resistance up to 1000°C
2. Materials are selected based on the usage temperature environment.
PTFE, PEEK, aluminum, SUS316, quartz, considering acidic, alkaline, and corrosive gases.
◎ Target Work
1. High-temperature wafers
2. Glass molded lenses and preforms
3. Compound semiconductor wafers
4. Glass substrates