Cleanroom-compatible "Bernoulli Chuck WAS Type"
Cleanroom-compatible "Bernoulli Chuck WAS Type"
Clean room compatible Bernoulli chuck that does not scatter debris.
The cleanroom-compatible "Bernoulli Chuck WAS type" efficiently suspends and transports workpieces in a non-contact state by ejecting gas. The "Bernoulli Chuck WAS type" is equipped with an exhaust recovery mechanism that captures the exhaust emitted from the nozzle, preventing the exhaust from leaking into the cleanroom. Therefore, it can be used for non-contact transport of wafers, glass substrates, and other items within the cleanroom.
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basic information
The cleanroom-compatible "Bernoulli Chuck WAS type" is equipped with a cushion chamber in the central part of the base, and by ejecting gas vertically from a nozzle placed in the center, it efficiently generates negative pressure through the ejector effect and positive pressure through the pressure-type air cushion effect, allowing for non-contact (non-contact) suspension gripping of the workpiece, enabling transport, inversion, and tilting while floating in the air. The cleanroom-compatible "Bernoulli Chuck WAS type" is equipped with an exhaust recovery mechanism that captures the exhaust ejected from the nozzle, preventing the outflow of exhaust into the cleanroom. Therefore, it can be used for non-contact transport of wafers and glass substrates within the cleanroom.
Price range
P3
Delivery Time
P4
Applications/Examples of results
Silicon wafers, sapphire wafers, solar cells, LCD glass substrates, non-contact transport of films.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
