Self-rotating spin dryer
■ The intake volume is large, so the drying efficiency is approximately doubled (compared to our company) compared to the N2 replacement method. Furthermore, there is a significant cost reduction. ■ The ionizer for the intake air is vastly more efficient than that of N2! It prevents contamination of the wafers. ■ The main cause of particle generation, the bearing section, adopts a unique structure from Omiya Industry that has a proven track record with a rotary type. It always maintains a clean state. ■ An automatic balance adjustment device can also be installed as an option. It cancels out vibrations caused by differences in the number of sheets and weight differences in the carrier.
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basic information
This is the OKV series of rotary spin dryers, ideal for trial production and small lot production lines. Unlike the conventional N2 replacement method, it adopts a centrifugal force + absorption air drying method that draws in ambient air from the front door.
Price information
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Delivery Time
Applications/Examples of results
■Wafer drying applications ■Compatible with spin dryers for non-wafer items as well
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Company information
Omiya Industrial Co., Ltd. manufactures and sells precision measuring instruments, semiconductor and liquid crystal manufacturing-related equipment, and provides maintenance for rotating machinery. Please feel free to contact us if you have any inquiries.
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