Simple design manual spin coater
◆Simple design, cost performance ---------------------------------------- <Specifications> Sample size…Φ2 inches to Φ6 inches Cup diameter…Φ300mm Rotation range…100-5000rpm Rotation accuracy…±1rpm Spindle motor…AC servo motor Rotation display…Digital Rotation speed setting…LCD touch panel Reagent nozzle…2 systems (air cylinder driven) Recipe setting…10 programs × 50 patterns Options…Sample stage, vacuum pump, pressure tank Utilities…Power supply, vacuum, dry air
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◆Simple design, cost performance ---------------------------------------- <Specifications> Sample size…Φ2 inches to Φ6 inches Cup diameter…Φ300mm Rotation range…100-5000rpm Rotation accuracy…±1rpm Spindle motor…AC servo motor Rotation display…Digital Rotation speed setting…LCD touch panel Reagent nozzle…2 systems (air cylinder driven) Recipe setting…10 programs × 50 patterns Options…Sample stage, vacuum pump, pressure tank Utilities…Power supply, vacuum, dry air
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We design, manufacture, and sell various types of equipment for both testing and research purposes as well as production automatic devices, including various front-end (photoresist-related) devices and manual spin coaters (for Si, LCD glass, compounds, etc.). [Testing and Research Development, Production Related Equipment for Semiconductors and LCDs] Various cleaning machines (wet, dry), spin coaters, mask aligners, developing and etching equipment, various vacuum devices, probers, and drillers for film thickness measurement, etc.