Resistance rate / Sheet resistance measuring instrument [RT-3000/RG-1000F]
Napson Corporation develops, manufactures, and sells various measurement systems for semiconductor wafers and FPD substrates. We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare. We have other products available, so please contact us for more details.
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basic information
【Fully automated system equipped with a glass cassette elevator and glass transport mechanism】 ◆ Self-test function, measurement position correction, wide measurement range ◆ Measurement patterns can be arbitrarily set with 0.1mm resolution ◆ Glass map (search) function ◆ CIM communication, 2-D/3-D mapping software ● Target glass substrate size: MAX 1,500mm × 1,850mm (Capable of accommodating sizes up to approximately 2,100mm × 2,400mm) (*For other details, please contact us.)
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Applications/Examples of results
ITO films for TFT, EL (OLED), CF, various metal films, n+a-Si films, etc.
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We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare.