Resistance Rate / Sheet Resistance Measuring Instrument [RT-3000/RS-1300]
Napson Corporation develops, manufactures, and sells various measurement systems for semiconductor wafers and FPD substrates. We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare. We have other products available, so please contact us for more details.
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basic information
Semi-automatic measurement system using X-Y probe axis movement (becomes a fully automatic system through docking with loader/unloader robots) ◆ World standard equipment in the FPD field ◆ Self-test function, measurement position correction, wide measurement range ◆ Measurement patterns can be set arbitrarily with 0.1mm resolution ◆ Glass lifting function, centering function ◆ CIM (host) communication, 2-D/3-D mapping software ● Target glass substrate size: 680mm×880mm to 2,200mm×2,500mm (conceptualized up to 2,880mm×3,080mm) (*For other details, please contact us.)
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Applications/Examples of results
ITO films for TFT, EL (OLED), CF, solar panels, various metal films, n+a-Si films, etc.
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Company information
We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare.