Resistance rate / Sheet resistance measuring instrument [WS-8800]
Napson Corporation develops, manufactures, and sells various measurement systems for semiconductor wafers and FPD substrates. We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare. We have other products available, so please contact us for more details.
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basic information
Fully automatic system equipped with a robot and alignment unit for a 4-probe measurement device ◆ Capable of thickness measurement, P/N determination, and temperature measurement (silicon wafers) ◆ Self-test function, calibration function, wide measurement range ◆ Thickness, peripheral position, and temperature correction function (during resistivity measurement) ◆ Capable of displaying sheet resistance and film thickness (during metal film measurement) ◆ Number of cassettes can be customized as per request ◆ Communication software compatible with SMIF or FOUP (optional) ◆ Mapping software for up to 1,225 points (optional) ● Target sizes: 3 inches to 8 inches (12-inch version also available) (*) For more details, please contact us.
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Applications/Examples of results
Silicon wafers, semiconductor process films (epitaxy, ion implantation, diffusion, etc.), metal films, ITO films, conductive ceramics, etc.
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Company information
We respond to all needs related to resistivity/sheet resistance, providing high-precision and high-performance systems by leveraging the latest technology and extensive experience, from specification design to aftercare.