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  6. 5nm Feedback Stage FS-1050SPX/XY

5nm Feedback Stage FS-1050SPX/XY

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FS-1050SPX / FS-1050SPXY

last updated:Jun 03, 2019

シグマ光機
シグマ光機
  • Official site

"Precision positioning device" with 5nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 5nm (*1). Thanks to our proprietary linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

    Other microscopesOther FA equipment
Sigmatech_FS-1050SPXY.jpg

5nm Feedback Stage FS-1050SPX/XY

Sigmatech_FS-1050SPXY.jpg
Sigmatech_FS-1050SPXY.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

A stage that is easier to handle and allows for feedback. Minimum resolution: 5nm Maximum moving speed: 5mm/sec (when using FC-611) Stroke: 50mm Table size: □120mm Compatible controller: FC-611 ■For more details, please request documentation or download the catalog■

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication technology, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.

catalog(3)

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5nm Feedback Stage System Catalog

5nm Feedback Stage System Catalog

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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

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Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

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Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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