Corrosive Special Gas Countermeasure Pressure Sensor PC-601 Series
This is a pressure sensor manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. In the manufacturing process of semiconductor devices, reactive and corrosive special gases such as HBr and HCl, which are halogen-based, are widely used. These corrosive gases react with even the slightest moisture adsorbed on the inner surface of stainless steel materials used in pressure sensors and gas filters in the gas supply piping system, forming corrosive byproducts. These byproducts generate particles, which can lead to contamination in semiconductor processes. Pureon has developed the PC-601 series pressure sensor for corrosive special gases, utilizing Hastelloy, which has far superior corrosion resistance compared to stainless steel SUS316L, to address these corrosive special gases.
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basic information
【Features】 ○ High corrosion resistance. ○ High precision and high reliability. ○ Wide measurement range. ● For more details, please contact us or refer to the catalog.
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Applications/Examples of results
Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.
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