Air pressure regulator, air pressure gauge, discharge pressure gauge, and other components are integrated into a single design, making it suitable for device integration! Adjustable from low pressure to high pressure.
The "KPW Series" is a unit that combines the peripheral equipment basically required for high-pressure pumps, making it easy to use for purposes other than dedicated mass production devices. It is a high-pressure water generation unit with an air-driven plunger pump built-in, designed to be suitable for device integration with components such as an air pressure regulator, air pressure gauge, and discharge pressure gauge integrated into one unit. It is used for high-pressure jet cleaning, such as IPA cleaning of wafers and solvent stripping. 【Features】 ■ Compact embedded pump unit (W194×H190×D490) ■ Standard built-in solenoid valve for air supply, air regulator, and pressure gauge ■ Optional built-in solenoid valve for pure water, discharge valve for air drive, and NMP-compatible sealing materials are available *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.
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basic information
【Specifications】 〇Size ・W194×H190×D490 ○Discharge Pressure ・KPW20 : 0.98~9.8MPa ・KPW30 : 1.47~14.7MPa ・KPW37.5 : 1.76~17.6MPa ○Discharge Flow Rate ・KPW20 : 1.13L ・KPW30 : 0.71L ・KPW37.5 : 0.58L ○Drive Air Pressure: 0.05~0.5MPa ○Air Consumption: Approximately 70L (at pump stroke rate of 60SPM) ○Liquid Contact Seals ・Pure Water・IPA: FKM ・NMP: Kalrez
Price information
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Applications/Examples of results
【Applications】 ■ Semiconductor cleaning equipment (jet cleaning) ■ Scrubber equipment ■ Lift-off equipment 【Examples of Achievements】 Usage cases in prototype experimental equipment
Line up（3）
| Model number | overview |
|---|---|
| KPW-20 | |
| KPW-30 | |
| KPW-37.5 |
catalog（1）
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Company information
"Surely, for what is in the future." With this theme, we focus on the design and manufacturing of semiconductor manufacturing equipment and related devices, developing products that meet our customers' needs. We hope that the technologies we possess can be commercialized in various fields and be of benefit to our customers. Our entire staff is passionately engaged in the process of turning our customers' ideas into products, including research and development and prototyping. We sincerely look forward to your inquiries.