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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Spin wafer processing equipment (etching, RCA, cleaning, developing, etc.)

Spin wafer processing equipment (etching, RCA, cleaning, developing, etc.)

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last updated:Oct 21, 2024

ソフエンジニアリング
ソフエンジニアリング
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A spin sheet device that can obtain high-quality substrates at a low cost.

■ We recommend the latest model of the UDS spin processor.  ◎ It is positioned as the "OLD" system within our company.  ◎ Please refer to the new UDS spin processor and the new Spin Dip processor.  ◎ All various elemental technologies related to spinning, such as mixing and rotational speed control, have been developed and applied to the new spin processor. ■ Optimal for RCA processing such as SPM, APM, HPM, and DHF. ■ Supports etching processes like ferric chloride and HF/HNO3. ■ Also compatible with lift-off resist stripping. ■ Can build a cost-effective system as a conventional flat Spin single wafer. ■ Ideal for the disposal of chemical waste. ■ Cross-contamination free.  ◎ During SPM processing, mixing of new sulfuric acid and hydrogen peroxide is done directly above the substrate, eliminating the need for a heater.  ◎ During APM processing, DIW is heated directly with water, and NH4OH and H2O2 are mixed in. ■ Optimal for processing Si, SiC, GaN, sapphire, GaAs, LT, etc. ■ Compatible with round substrates as well as square shapes like Cr masks. *For more details, please refer to the PDF document or feel free to contact us.

    Other semiconductor manufacturing equipment
キャプチャ.PNG

Spin wafer processing equipment (etching, RCA, cleaning, developing, etc.)

キャプチャ.PNG
キャプチャ.PNG
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ソフエンジニアリング

ソフエンジニアリング

Industrial Electrical Equipment

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* Under a team of experts well-versed in the manufacturing processes of various devices, we engage in consistent in-house activities that include the custom development, manufacturing, and sales of distinctive wet processing equipment tailored to meet the diverse needs of our clients, backed by years of accumulated know-how since our establishment, as well as after-sales support. * We manufacture and sell optimal system equipment while proposing processes that align with our clients' needs. * Our company is well-acquainted with various equipment forms such as batch (wet stations) and sheet (conveyor, spin), and we have numerous achievements; however, we particularly stand out with our Spin sheet-type equipment. * With the establishment of "patents" and "trademarks," we ensure that our products, such as the "Spin Dip Processor" and "UDS Processor," which possess a wide variety of unique features, cannot be easily replicated by others, attracting worldwide attention.

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