XYZ Stage XYZ Series
A hollow XYZ stage optimized for positioning adjustments of heating mechanisms, various introduction devices, and other components, enabled by a 3-axis movement mechanism. 【Features】 ○ Bakeable due to all-metal seals ○ Usable with various ultra-high vacuum devices such as MBE systems, thanks to the conflat flange specification ○ Compatible with φ70CF to φ203CF ○ X-Y movement possible with two adjustment knobs, allowing for precise movement using cross roller bearings ○ Enables multi-axis motion transmission into a vacuum when combined with transfer rods, rotary introduction devices, linear introduction devices, etc. ● For other functions and details, please download the catalog.
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basic information
A hollow XYZ stage that is optimal for positioning adjustments of heating mechanisms, various introduction mechanisms, and other components, enabled by a 3-axis movement mechanism. 【Features】 ○ Bakeable due to all-metal seals ○ Compatible with various ultra-high vacuum devices such as MBE systems, thanks to the conflat flange specification ○ Supports φ70CF to φ203CF ○ X-Y movement is possible with two adjustment knobs, allowing for precise movement via cross roller bearings ○ Enables multi-axis motion transmission into a vacuum when combined with transfer rods, rotary introduction devices, linear introduction devices, etc. ● For other functions and details, please download the catalog.
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Company information
In 1972, the first president, Horita, established Taisei Sangyo Co., Ltd. using the entrance of his home as a workplace, and since then, we have been dedicated to technology development and research. Initially, we were involved in the development of devices such as the Polack counter for the Meteorological Research Institute, starting our work in the field of atmospheric science. Subsequently, we expanded our work into the vacuum world by starting maintenance services for leak detectors. Around the 10th anniversary of our founding, work in ultra-high vacuum began to increase, and by the 15th anniversary, we were able to manufacture small devices. Currently, our scope of work has significantly expanded, not only covering ultra-high vacuum, MBE, CVD, ECR, and RF radical sources, but also advancing the development of functional components utilizing various plasmas, ions, or electrons. In the future, we aim to become a small enterprise that can truly compete in the world of cutting-edge technology.