Three-dimensional measurement of nanoscale surface roughness.
AFM is a method that scans the surface of a sample with a fine probe and measures nanoscale surface topography in three dimensions. - It can measure a wide range of samples, from insulators to soft organic materials, including metals, semiconductors, and oxides. - By using tapping mode with low contact pressure, it is possible to minimize sample damage.
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basic information
■ Probe Used A sharp probe made by processing silicon single crystal wafers is used to scan the sample surface. The tip diameter has been processed to less than 10 nm. ■ Tapping Mode In tapping mode, the probe is forced to oscillate at a high frequency of about 300 kHz while scanning the sample surface. During the scanning process, as the probe approaches the sample surface, the oscillation amplitude of the probe decreases, and conversely, it increases as the probe moves away. This method controls the height of the probe to maintain a constant oscillation amplitude by compensating for this change. The position of the probe is determined by illuminating it with a laser and detecting the reflected light with a photodetector.
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Applications/Examples of results
- Surface roughness evaluation of substrates (Si, compound semiconductors, glass, metals, organic materials, etc.) - Surface roughness evaluation of thin films (polysilicon, oxides, metals, organic materials, etc.) - Shape evaluation of MEMS
Detailed information
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Please consult with us first. ★ We will start by proposing an analysis plan ★ We can, of course, meet at your company for discussions. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
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We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to our customers' needs ★ Depending on your requests, we will introduce analysis techniques and explain analysis data. ◆ Example seminar content - A broad explanation of MST analysis methods - A thorough and detailed explanation of specific analysis methods from the principles - Explanation of the analysis data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!