5.6-inch universal cassette-less processing
By unitizing the framework, we have achieved greater efficiency in on-site recovery operations. Major modifications such as equipment configuration can also be completed with on-site construction in a short time.
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basic information
【Features】 ○ Simultaneous processing of batch quantities by auto handler ○ Temperature control function for each tank ○ Mirror inversion mechanism ○ Compatible with half-pitch processing ○ Monitoring of resistivity values in the final tank ● For more details, please contact us.
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Applications/Examples of results
Semiconductor
Company information
Cepha Technology Co., Ltd. recognizes that the preservation of the global environment is one of humanity's most important common challenges, and as a company involved in the manufacturing and sales of industrial labor-saving devices and software development, we conduct all our business activities with consideration for environmental protection, contributing to society.







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