This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).
This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.
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basic information
○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guarantee), digital control) ○ Maintains compatibility with analog mass flow controllers ○ General-purpose interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD.
Price range
P3
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, liquid crystal, solar cell, and electronic component manufacturers, as well as their equipment manufacturers.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.