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  1. Home
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  3. Measurement and Analysis
  4. Other measuring instruments
  5. Flow Meter
  6. Mass Flow Controller/ Meter "4800 Series"

Mass Flow Controller/ Meter "4800 Series"

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Model 4850 / 4860

last updated:Feb 12, 2025

ITWジャパン
ITWジャパン
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Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

    Flow MeterFlow Control
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Mass Flow Controller/ Meter "4800 Series"

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  • Related Link - https://www.brooksinstrument.com/ja-jp/products/ma…
  • Special site - Product/service details - https://pr.mono.ipros.com/itwjyapan/product/

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【Other Features】 ■ Suitable for a wide variety of non-corrosive gases ■ Fast response time ensures quick steps even during process recipe changes ■ Suitable for OEMs ■ Various communication options that can be tailored to user requirements *For more details, please refer to the related link page or feel free to contact us.

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【Applications】 ■ Heat treatment, cutting/welding, thermal processes ■ Solar/thin film physical vapor deposition (PVD) systems ■ Analytical devices for measuring and controlling reagent, calibration, and sample gas flow *For more details, please refer to the related link page or feel free to contact us.

catalog(7)

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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

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Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

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Service & Support

Service & Support

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[New Products] BCU Series / New Quantim QMC Series (For liquid flow management in environmental, bio, and materials processes)

[New Products] BCU Series / New Quantim QMC Series (For liquid flow management in environmental, bio, and materials processes)

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[New Product] GC Series (Ultra-Compact MEMS Mass Flow Controller)

[New Product] GC Series (Ultra-Compact MEMS Mass Flow Controller)

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GF series (supports multi-gas and multi-range evaluation to high purity and high temperature processes)

GF series (supports multi-gas and multi-range evaluation to high purity and high temperature processes)

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SLA series (supports CCUS, exhaust gas treatment, hydrogen utilization, and thermal treatment processes)

SLA series (supports CCUS, exhaust gas treatment, hydrogen utilization, and thermal treatment processes)

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Solutions from Brooks Instrument that support a sustainable future.

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Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.

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Genealogy chart of Brooks MFC

Proposal for support of the old mass flow called "Legacy."

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Brooks Instrument provides support for all mass flow devices previously sold by various manufacturers, including Tylan General, Mykrolis, Entegris, UNIT, Kinetics, and Celerity, as shown in the "Brooks MFC Genealogy Chart" on the right. This accounts for approximately 80% of the legacy mass flow devices in the market. In response to customer requests, we may suggest repairs in some cases, and in others, we may recommend replacement with our best-selling mass flow devices, the GF120 or GF125. We have already replaced over 20,000 units from these legacy devices to the GF series. It is possible to replace nearly all models of legacy mass flow devices featured in the "Brooks MFC Genealogy Chart." If you are having trouble with repairs or replacements of legacy mass flow devices, please feel free to consult our sales department.

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ITWジャパン

ITWジャパン

Machine elements and parts

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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.

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