Solutions from Brooks Instrument that support a sustainable future.

Solutions that support a sustainable future

Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor the precise flow to support future energy. Brooks Instrument's flow meters support the energy transition. 【Application Case Introduction】 *For more details, please download the PDF or feel free to contact us.

• Flow Meter
• Pressure Control
• Safety Controller

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

• Other measurement, recording and measuring instruments

A wide range of products with excellent durability is available. We also offer repair and maintenance services. We provide materials introducing our approach to the bio, EPC, and thin film industries.

We sell equipment related to flow and pressure control, such as mass flow controllers, pressure controllers, and transducers. We offer a wide range of highly reliable products that can operate stably over long periods. We also provide services such as technical training, calibration, and repair maintenance. Currently, we are compiling and presenting materials that introduce equipment suitable for the bio, EPC, and thin film industries, along with their features and implementation benefits. [Material Lineup] ■ Flow and pressure measurement equipment for the biopharmaceutical and life sciences industries ■ Area flow meters for EPC flow solutions ■ Mass flow controllers for gases and liquids for vacuum and pressure measurement and control * Each document can be viewed via "PDF Download." Please feel free to contact us with any inquiries.

• Flow Meter
• Pressure
• controller

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

The Quantim® QMC Coriolis mass flow controller and meter provide extremely accurate, stable, and reproducible measurement and control for very low flow rates of gases and liquids. This third-generation new Quantim QMC Coriolis mass flow controller and meter contribute to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. 【Features】 ■ True mass flow measurement ■ Accurate density measurement ■ Additional I/O options: 0-10 Vdc, 0-20 mA, RS485 S-Protocol ■ A wide range of seal materials, certificates, and certification options ■ Easily accessible service port *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

• Flow Meter
• Flow Control
• Safety Controller

Introducing cost-effective gas flow measurement for targeted applications!

The "5700 Series" is an elastomer-sealed mass flow meter designed to meet the needs of purge gas, process analysis, and flow measurement. It features electronic output signals as an alternative to turbine meters, area flow meters, and other volumetric flow meters, excelling in cost efficiency and stability. If you need a compact and economical mass flow meter that provides stable flow measurements over the long term without the need for temperature or pressure adjustments, please choose our product. 【Features】 ■ Dedicated for measurement ■ Wide flow range ■ Stainless steel gas contact materials ■ Single-sided power input ■ 0.5 V output signal *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.

The "5850EMH Series" is a high-temperature mass flow controller with a metal seal that ensures high leak integrity and allows for flexible application support. By combining various options, it achieves advanced high-temperature gas measurement and control. At the core of this product is a highly stable sensor that displays electronic output signals and flow rates. This signal is used for display, recording, and control without the need for an automatic zero adjustment circuit. 【Features】 ■ High leak integrity (10-11 Pa.m3/s (10-10 atm.cc/s) He or less) ■ Wide flow range (0.003 to 100 slpm) ■ High-purity VAR 316L stainless steel ■ Prevents particle generation ■ Helium leak check port *For more details, please refer to the related link page or feel free to contact us.

• Other measurement, recording and measuring instruments
• controller

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

Mass flow controller/meters that support multiple gases with a single device. A compact readout unit that can connect up to four devices is also introduced.

The "GF40 Series" is a mass flow controller/meter that supports multiple gases with a single unit, enhancing process flexibility and productivity. Equipped with the manufacturer's unique "MultiFlo Technology," it enables high-precision flow control and measurement, making it suitable for systems that use diverse gases. It excels in processes and facilities where the type of gas is frequently changed or where it is necessary to readjust the range while maintaining measurement and control accuracy. Additionally, the "0254" is a readout unit equipped with an RS232 serial port, in addition to power supply and analog control functions. Compliant with the RoHS directive, it offers user-friendly operability. There are installation options that allow for easy installation in various applications, providing power to up to four Brooks mass flow or pressure devices. 【Features】 ◎ "GF40 Series" ■ Equipped with abundant actual gas data ■ Capable of changing gas types and flow ranges, allowing one unit to accommodate various research themes ◎ "0254" ■ Flow settings support instantaneous control and batch control, with flow display options for instantaneous and cumulative readings ■ Space-saving design allows for connection of up to four mass flow controllers/meters

• Electrical Instruments/Electrometers

MFC that makes everything possible

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

• Flow Meter
• Flow Control

Thin films, coatings, and surface treatments cover a wide range of industries and applications!

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of plate glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, pressure measurement, and control devices cover PVD and CVD process applications. Additionally, our products are suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ High reproducibility and precision gas supply ■ Excellent quality, accurate thickness, and uniform film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield *For more details, please refer to the PDF document or feel free to contact us.

• Flow Meter
• Flow Control

We have over 70 years of global experience in more than 80 countries!

When project design, procurement, and construction (EPC) contractors require high-performance flow meter technology and advanced technical expertise, we become a reliable supplier for precise solutions. Our products have a global track record of over 70 years in more than 80 countries, adopted across application fields ranging from nuclear and biotechnology to power and petrochemicals. The performance and value of our products speak for themselves, providing suitable support to EPC partners for each project. 【Features】 <MT3809 Series Metal Tube Area Flow Meter> ■ Robust design that accommodates high process pressures ■ Alarm function complies with SIL 2 requirements ■ Multiple corrosion-resistant wetted materials and indicator housings available ■ Complies with ASME B31.3 standards *For more details, please refer to the PDF materials or feel free to contact us.

• Flow Meter

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.

• Flow Meter
• Pressure Control
• Safety Controller

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

Our company has experienced technical support members with deep knowledge of flow control, a strong background in electrical and mechanical engineering, and a profound understanding of control systems in the field of biotechnology. With decades of extensive experience, we restore equipment to "like-new condition." Our calibration service experts issue calibration certificates. Please feel free to contact us with your service and installation requests. 【Features】 ■ All repairs use factory-certified new parts ■ All repair services come with a warranty period ■ Calibration service experts issue calibration certificates ■ Global service locations ■ Hardware upgrades are possible via digital protocols *For more details, please refer to the PDF materials or feel free to contact us.

• Flow Meter
• Pressure
• Calibration and repair

We have added a new **"Glossary"** to the Hyper CLT sheet website. In the civil engineering and construction industries, there are many specialized terms such as "CLT," "NETIS," "temporary roads," and "wooden lightweight sheets." Therefore, we have introduced related terms in an easy-to-understand manner so that those who are encountering Hyper CLT sheets for the first time can understand the products and technologies. Hyper CLT sheets are wooden lightweight sheets for civil engineering that utilize wood CLT and are registered under the Ministry of Land, Infrastructure, Transport and Tourism's NETIS technology as **"TH-250021-A."** We hope that by not only conveying the features of the product but also sharing the underlying technologies and terminology, users will feel a closer connection to Hyper CLT sheets. We will continue to enhance our website and provide clear information related to wood, NETIS, civil engineering, and CLT.

Hotron Inc. has launched its new product, the "Vehicle Count Sensor CCS3"! This product is a ceiling-mounted sensor that combines infrared and radar technology. It reliably detects vehicles in both directions with a single unit, accommodating traffic during congestion and vehicle passing, thus achieving efficient occupancy management in large parking lots. Additionally, it can be utilized for exit warning purposes in addition to vehicle counting, contributing to the safe and smooth operation of parking facilities. 'Features' - Improved detection performance against changes in road surface during rainy weather by using both infrared and radar. - Equipped with IP67 waterproof and dustproof performance, making it effective even in salt damage areas. - Various settings can be configured from a dedicated app (for Android devices), with current settings easily understandable at a glance. - The base dimensions are the same as the previous model "CCS2," allowing for smooth replacement of existing equipment. *For more details, please refer to the product information, catalog download, or contact us.*

On September 15, 2026, we issued a press release regarding the wooden lightweight sheet "Hyper CLT Sheet." The Hyper CLT Sheet is a civil engineering sheet that utilizes CLT (Cross-Laminated Timber) stacked in an orthogonal direction. It can be used in various locations such as temporary roads, access routes, heavy machinery work yards, and material storage areas. The 5×10 version weighs approximately 230 kg, making it relatively lightweight and easy to install, remove, and relocate. Additionally, it offers environmental benefits such as reducing glare and metallic sounds typical of wood, as well as CO2 fixation. Furthermore, it can be proposed for the use of new technologies in public works as a **registered technology with the Ministry of Land, Infrastructure, Transport and Tourism "TH-250021-A."** Through this press release, we aim to expand the new wooden lightweight sheet that combines wood, NETIS, civil engineering, and CLT to more construction sites.

● The production time for cast prototypes can be shortened! Since model making is not required, the production time for prototypes, which previously took about a month, can be significantly reduced. ● Model costs can be reduced! By directly producing sand molds from 3D data, there is no need for model production costs. If changes to the model are necessary, they can be addressed by modifying the 3D data. ● Similar products with different shapes and dimensions can be prototyped simultaneously! Different products, such as similar shapes or varying dimensions, can be molded at the same time in one molding process. This allows for the verification of multiple types in a short period.

The "HA-T Series" is an energy-saving automatic door sensor that opens only for those who wish to enter, whether on a busy street or in a narrow passageway. The automatic door opens simply by bringing your hand close, addressing hygiene concerns even in facilities used by a large number of people. You can choose between "Non-vision Mount Type/HA-T401" and "Non-vision Built-in Type/HA-T520" depending on the application and installation location. 【Recommended for such places!】 ☑ Entrance facing a busy corridor ☑ Presence of counters or signs near the door ☑ Buildings facing narrow passages ☑ Buildings that prioritize aesthetics ☑ Hospitals and facilities that consider hygiene ☑ Large facilities with many doors 【Features】 ● Adaptable to various door types with four detection spot settings ● Reduces unnecessary opening and closing, contributing to energy-saving by minimizing wasteful power consumption ● Equipped with a light touch function, allowing the door to open and close just by waving your hand, ensuring hygiene ● Can also be used as a wide detection range non-vision infrared sensor ◎ For more details, please download the materials or contact us.