Mass Flow Controller/ Meter "5850E Series"

Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.

Excellent long-term stability and maintenance of production accuracy! High reliability, precision, and repeatability in measurement and control. The '5850E Series' is an elastomer-sealed thermal mass flow controller/meter. With a proven track record of active use in thousands of applications worldwide for several decades, this series is equipped with a unique stable flow sensor that provides the high reliability, precision, and repeatability in measurement and control required for today's demanding industrial production processes. 【Features】 ■ Removable flow sensor ■ No influence from installation orientation ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve

Brooks Instrument provides support for all mass flow devices previously sold by various manufacturers, including Tylan General, Mykrolis, Entegris, UNIT, Kinetics, and Celerity, as shown in the "Brooks MFC Genealogy Chart" on the right. This accounts for approximately 80% of the legacy mass flow devices in the market. In response to customer requests, we may suggest repairs in some cases, and in others, we may recommend replacement with our best-selling mass flow devices, the GF120 or GF125. We have already replaced over 20,000 units from these legacy devices to the GF series. It is possible to replace nearly all models of legacy mass flow devices featured in the "Brooks MFC Genealogy Chart." If you are having trouble with repairs or replacements of legacy mass flow devices, please feel free to consult our sales department.