We precisely control the flow of various liquids using our proprietary sensors.
This is a normally open type mass flow controller for liquids. It can control flow rates from 0.01 to 2.0 g/min (equivalent to C2H5OH). Any liquid that does not corrode stainless steel is acceptable. 【Features】 - Long-term flow stability with a flow sensor using Lintec's unique ambient temperature compensation method - Compact design with a body width of 28.6 mm and an integrated valve structure - Equipped with a general-purpose digital interface (RS-485 compliant) - High-speed response due to the use of a piezo actuator - Diaphragm valve structure adopted (Minimal dead space, structure that minimizes bubble generation) - Bypass-less structure (Easy liquid introduction and internal purging, free installation orientation) - RoHS compliant *For other functions and details, please download the catalog.
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basic information
○ Long-term flow stability with a flow sensor featuring Lintec's unique ambient temperature compensation method ○ Compact design with a body width of 28.6mm and integrated valve structure ○ Equipped with a general-purpose digital interface (compliant with RS-485) ○ High-speed response achieved through the use of a piezo actuator ○ Diaphragm valve structure adopted (Minimal dead space, structure that minimizes bubble generation) ○ Bypass-less structure (Easy liquid introduction and internal purging, free installation orientation) ○ RoHS compliant
Price range
P3
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, liquid crystal, solar cell, and electronic component manufacturers, as well as their equipment manufacturers.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.