Koganei High Viscosity Quantitative Discharge Pump
An electric pump designed for slit coaters used for substrates in applications such as liquid crystals, PDP, and organic EL, where uniform thin film coating is required. The structure of the high-viscosity discharge and highly reliable CT pump has been further evolved to enable constant flow rate control. We have a proven track record for high viscosity of over 10,000 cp. Maximum discharge volumes are available in 30ml, 60ml, 100ml, 200ml, and 300ml, with pump sizes tailored to the customer's substrate size and application.
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basic information
An electric pump designed for slit coaters used for substrates in applications such as liquid crystal displays, PDPs, and organic ELs, where uniform thin film coating is required. The high-viscosity discharge and highly reliable CT pump structure have been further evolved to enable constant flow rate control. We have a proven track record for high viscosity of over 10,000 cp. Maximum discharge volumes are available in 30ml, 60ml, 100ml, 200ml, and 300ml, with pump sizes tailored to the customer's substrate size and application.
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Applications/Examples of results
Semiconductor manufacturing process, "coater and developer process" for ultra-precise quantitative dispensing of various photoresist liquids and SOG, suitable for high-viscosity quantitative dispensing of around 10,000 cp.
Company information
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