スピン現像装置×株式会社カナメックス - List of Manufacturers, Suppliers, Companies and Products

装置寸法：1200W×1100D×2000H(200CBT)/1500W×1100D×2000H(300CBT)

基板をマニュアルでチャックにセットし、パドル現像、リンス、スピン乾燥します。

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装置寸法：1700W×1300D×1400H

基板をマニュアルでチャックにセットし、パドル現像、リンス、スピン乾燥します。本体側面にキャニスター缶を収納可能。

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装置寸法：2000W×1200D×2000H　(200WCBT)/2000W×1500D×2000H (300WCBT)

セットをローダーにセットし、クリーンロボットにて基板の搬送を行い、パドル現像、リンス、スピン乾燥する枚葉自動スピン現像装置です。本体側面に薬液供給タンク又は廃液タンク(20L)を2本内蔵可能です。

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スピン現像装置 Product List