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拡がり抵抗測定器 Product List

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全自動拡がり抵抗測定装置 SRP2000

全自動拡がり抵抗測定装置

SRP(Spreading Resistance Profiler)装置は,斜め研磨したSiウェハーを深さ方向に2探針をコンタクト させそのプローブ間の拡がり抵抗値からSiの深さ方向の比抵抗プロファイル,EPI層の厚み,PN接合の深さおよびキャリヤ濃度分布を測定する装置です。

  • その他検査機器・装置
  • 拡がり抵抗測定器

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