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Technical Information Magazine 201901-02 Nanometer Scale Local Structure Analysis

The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control.

**Abstract** Spectroscopic analysis techniques utilizing near-field light localized at the tips of metal chips are highly anticipated methods for analyzing chemical structures in the nanometer range. Techniques such as tip-enhanced Raman spectroscopy and near-field Raman spectroscopy are representative methods, and various studies have been conducted on their principles and applications. This paper presents examples of their application in material analysis and discusses their practicality for material characterization. **Table of Contents** 1. Introduction 2. Crystal structure analysis of CNTs using TERS 3. Stress analysis at the SiO2/SiC interface using SNOM-Raman 4. Conclusion

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Technical Information Magazine 201905-01 Crystal Orientation Analysis with High Spatial Resolution

The technical information magazine The TRC News provides the latest information on analytical techniques that are useful for research and development, solving production troubles, and quality control.

**Abstract** Using the TEM-based crystal orientation analysis system "ASTAR," it is possible to achieve higher spatial resolution than that of SEM-based EBSD (with spatial resolution of various EBSD methods being around tens of nanometers, while the ACOM-TEM method using ASTAR achieves 2 to 5 nm). Additionally, it is characterized by the ability to identify a greater variety of crystal structures. By obtaining crystal orientation maps, crystal phase maps, and grain size distributions that are difficult to acquire through conventional TEM analysis, quantitative interpretation becomes possible. Furthermore, since measurements can be taken in the same field of view as TEM observations, it allows for complex analyses combined with (S)TEM-EDX/EELS and the use of in-situ TEM. **Table of Contents** 1. Introduction 2. ACOM-TEM Method Using ASTAR 3. Examples of Analysis Using ASTAR 4. Conclusion

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