Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.
46～60 item / All 197 items
It will help with quick pump-down and improvement of membrane quality.
Rapid cooling, rapid heating Effectively removing moisture from the deposition equipment is an essential challenge for vacuum deposition. The TELEMARK cryochiller series incorporates the latest technological advancements in cryochillers.
The total cost is significantly different! This will become a concept that greatly changes weight design in facility and building construction.
The "BLACKBOX" is a compact water heat source heat pump (water-cooled chiller) that is very advantageous for handling on-site due to its small size and lightweight. Internally, it is designed to thoroughly avoid failures by eliminating four-way valves, allowing for cold and hot water output without switching (controlled on the piping side as needed). To minimize on-site costs, the refrigerant gas pathway is kept to a minimum, making it easy for equipment construction companies unfamiliar with refrigeration units to install. 【Features】 ■ The number of necessary parts, size, weight, and operational stability vary greatly. ■ All on-site costs can be reduced, resulting in significantly different total costs. ■ Reduces weight load in architectural design. ■ Suitable size for extremely small spaces. ■ Multiple units can be installed. *For more details, please refer to the PDF materials or feel free to contact us.
It is an energy-saving, high-efficiency inverter chiller.
1. Energy-saving realization (It is possible to reduce annual power consumption by approximately 30% by equipping a high-efficiency DC brushless inverter compressor). 2. Precise temperature control and high responsiveness to varying loads (During stable load conditions, stable chilled water supply within ±0.1℃ of the set water temperature is achieved. High-performance inverter control allows operation from 20% to 100% load). 3. Wide range of chilled water supply temperatures (Stable supply is possible over a wide range of 3℃ to 30℃ at the chiller outlet water temperature. It can operate year-round at ambient temperatures from -5℃ to 43℃). 4. Simple system with cost savings and high reliability. 5. Space-saving achieved through compact continuous installation.
Eco chiller pursuing energy saving and precise temperature control.
The "Air-cooled Inverter Eco Chiller" can reduce annual power consumption by approximately 30% due to the high-efficiency DC brushless inverter compressor. (CO2 emissions are reduced by about 30%) During stable load conditions, it can provide a stable supply of chilled water within a temperature range of ±0.1℃ of the set water temperature. It can stably supply chilled water over a wide range of outlet water temperatures from 3℃ to 30℃. For more details, please download the catalog.
Water-cooled eco chiller pursuing energy saving and precise temperature control.
The "water-cooled inverter eco chiller" can reduce annual power consumption by approximately 50% due to the high-efficiency DC brushless inverter compressor. (CO2 emissions are reduced by about 50%) During stable load conditions, it can provide a stable supply of chilled water within a temperature range of ±0.1℃ of the set water temperature. It can stably supply water at a wide range of outlet temperatures from 3℃ to 30℃. For more details, please download the catalog.
Stable supply over a wide range of -10℃ to 10℃. Water-cooled brine eco-chiller pursuing energy savings and precise temperature control.
The water-cooled brine inverter eco-chiller can provide stable supply over a wide range of outlet water temperatures from -10°C to 10°C. With the installation of a high-efficiency DC brushless inverter compressor, it can save approximately 50% of annual power consumption (reducing CO2 emissions by about 50%). Additionally, under stable load conditions, it can provide stable chilled water supply within ±0.1°C of the set water temperature. *For more details, please download the catalog or contact us.
Low GWP refrigerant chiller "RJ-XA type"
We would like to introduce our semiconductor manufacturing equipment chiller, the 'RJ-XA model'. It uses a low GWP refrigerant (R513A) that complies with global environmental regulations. It also achieves reduced power consumption through inverter control. Additionally, as an optional specification, it is available in a version that does not use copper or brass materials in the fluid contact parts, which helps reduce the risk of corrosion. 【Features】 ■ Low GWP refrigerant R513A adopted (GWP = 629) ■ Precise temperature control ■ Energy-saving ■ Space-saving ■ Copper and brass-free (optional) *For more details, please download the PDF or feel free to contact us.
Energy-saving, space-saving, and construction-saving; can be installed in limited spaces! High-capacity modular chiller.
The "DT-RIII" is an air-cooled heat pump chiller that can expand the intake temperature during cooling operation up to a maximum of 52°C. It is available in header-integrated type, pump-integrated type, and pump-less type, allowing for selection based on design and construction methods. Additionally, it features high efficiency and large capacity, along with low noise levels. Depending on the installation environment, noise mitigation measures can also be simplified. 【Features】 ■ Expands the intake temperature during cooling operation up to a maximum of 52°C ■ Adoption of R32 refrigerant and reduction of refrigerant charge significantly lowers environmental impact ■ Equipped with a new type of compressor, achieving top-class cooling COP ■ Enhanced salt damage resistance of the air-side heat exchanger ■ Available in header-integrated type, pump-integrated type, and pump-less type *For more details, please refer to the PDF materials or feel free to contact us.
We accommodate the specifications and prices that customers potentially seek with three models of chillers!
This catalog introduces three models of "small water tank chillers." We feature the high-spec model "RKE series," which offers energy-saving, high-precision temperature control, and advanced functionality, as well as the mid-grade models "RKS-JM/RKS-GM series" and the economical model "RKS-J series," including specifications and dimensional drawings. Additionally, we provide application information by series and pre-installation materials, making it easier to reference when selecting products. [Contents (partial)] ■ Selectable Orion small water tank chillers ■ Application information by series ■ RKE series ■ RKS-JM series ■ RKS-GM series *For more details, please refer to the PDF materials or feel free to contact us.
Adopts a submersible pump (without mechanical seals)! The operating status of the chiller can be monitored on a single screen.
The HRS400 Series is a standard type of thermochiller. It is air-cooled and has a cooling capacity of 38 kW, with a set temperature range of 5 to 35°C. The maximum ambient temperature for use is 45°C, and the temperature stability is ±0.1°C, with a waterproof structure rated IPX4. Additionally, the adoption of a touch panel has improved the product's settings, operation, and visibility. 【Specifications (partial)】 ■ Cooling capacity: 38 kW ■ Power supply ・3-phase 380–415V (50Hz/60Hz) ・3-phase 460–480V (60Hz) ■ Set temperature range: 5–35°C ■ Maximum ambient temperature for use: 45°C *For more details, please download the PDF or feel free to contact us.
The refrigerant used is non-toxic and non-flammable, so there are no air transport restrictions! It is possible to refill the circulating liquid from the front.
We would like to introduce our thermochillers designed for the semiconductor industry. These chillers are compatible with non-fluorinated (CO2 refrigerant) and feature a slim design that allows for efficient placement. They do not require simple inspections based on the Fluorocarbon Emission Control Law. Additionally, there are no costs for the recovery or disposal of fluorocarbons. 【Features】 ■ GWP: 1 ■ Air transportable ■ 21% reduction in footprint ■ Improved workability ■ Zero fluorocarbon management workload ■ Zero costs for fluorocarbon recovery and disposal *For more details, please download the PDF or feel free to contact us.
Energy-saving, space-saving, and construction-saving! A large-capacity modular chiller that can be installed in limited spaces.
This catalog introduces the air-cooled heat pump chiller "DT-RIII" compatible with R32 refrigerant. We offer heat pump and cooling-only models, including "40/50/60/70 horsepower," as well as "80 horsepower," "Cool Toughness specification," "Heating Enhancement specification," and "Irrigation specification" in our lineup. It is a useful reference, so please take a moment to read it. 【Featured Products】 ■ 40/50/60/70 horsepower ■ 80 horsepower (cooling only) ■ Cool Toughness specification (60 horsepower cooling only) ■ Heating Enhancement specification (40, 50, 60 horsepower heat pumps only) ■ Irrigation specification (compatible with all horsepower) *For more details, please download the PDF or feel free to contact us.
![[Chira] The ESL-60 series, pursuing efficiency and energy saving.](https://image.mono.ipros.com/public/product/image/506/2000002884/IPROS8738842573397075905.jpg?w=280&h=280)
A new temperature management system that combines "efficiency" and "savings."
We would like to introduce the "ESL Series" multi-channel chiller, which combines energy efficiency and energy saving, from ATS Japan Co., Ltd. ■ A model with excellent energy efficiency thanks to hot gas bypass ■ The dual-channel model allows one chamber to be handled by a single unit! ■ Slim body with a width of 450mm ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on our experience with thousands of installations, we can also customize solutions for other industries such as food, medical, and scientific fields according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us.
A chiller that enables a wide temperature range management from -70℃ to +200℃!
This is a notice from ATS Japan Co., Ltd. regarding the multi-channel chiller "EN Series." ■ Up to 4 types of modules can be combined (-70℃ to +200℃) ■ Compatible with various circulating fluids ■ Supports various interfaces ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on thousands of installations to date, we can also customize solutions for other industries such as food, medical, and physical sciences according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us first.
A temperature control system that pursues high cooling capacity and fast heating and cooling.
We would like to introduce the "SX Series" single-channel chiller from ATS Japan Co., Ltd., which pursues high cooling capacity and rapid heating and cooling. ■ High cooling capacity ■ Improved throughput due to rapid heating and cooling ■ Enhanced efficiency and energy savings through improvements in the jug! ■ Compatible with high-temperature cooling water (+30°C) ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on thousands of installations to date, we can also customize solutions for other industries such as food, medical, and scientific fields according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us first.
