Chiller Product List and Ranking from 50 Manufacturers, Suppliers and Companies

Temperature control chiller "ThermoRack1201"

Optimal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

Company：エムエス機器
Price：Other

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Have you completed your measures against fluorocarbons? 'NIKOLA3K/5K'

High cooling capacity Peltier chiller without refrigerant gas - Ideal for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration!

The "NIKOLA3K/5K" is a high cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerant gases. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. Compatible with products from major etcher manufacturers! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan for the drive unit ■ Reduces noise and vibration

Company：エムエス機器
Price：Other

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Ideal for small laser devices! Peltier chiller TCubeEdge

Compact! Low noise, low vibration, and precise temperature control! Excellent cost performance for Peltier cooling chillers!

The TCubeEdge, with a maximum cooling capacity of 290W, optimizes the performance of your equipment with excellent temperature reliability, resulting in high profitability. The TCubeEdge quickly responds to temperature changes in circulating water, achieving a reproducibility of ±0.05°C even near room temperature in temperature control ranging from 0°C to 65°C. The centrifugal pump, which ensures smooth flow, operates without vibration, making it suitable for various applications requiring temperature control in lasers, optics, and analytical instruments. Equipped with an electronic temperature control module that lasts over 200,000 hours, the TCubeEdge operates with minimal noise and vibration due to the absence of a compressor and very few moving parts. It is also an environmentally friendly product as it does not use Freon.

Company：エムエス機器
Price：Other

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Chiller dedicated to bioprocessing

This is an optimal chiller for single-use in bioprocessing.

In recent years, the introduction of single-use technology has rapidly progressed to reduce risks and improve efficiency in bioprocessing. In the manufacturing of biopharmaceuticals, plastic culture bags are used instead of traditional stainless steel culture tanks. By utilizing this new technology, it is expected to streamline biopharmaceutical production by omitting in-place cleaning and sterilization processes, enabling quick responses to multi-product manufacturing, and preventing contamination in the production of highly pharmacologically active drugs.

Company：エムエス機器
Price：Other

Other semiconductor manufacturing equipment
Chiller

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Chiller for semiconductor manufacturing equipment

This is a chiller designed for semiconductor manufacturing equipment.

Many devices used in the semiconductor manufacturing process require cooling equipment (chillers) to remove the heat generated and maintain a constant temperature. Thermo Fisher Scientific's chillers for semiconductor manufacturing are designed to provide: - High productivity - Long-term reliability - Simple operability that does not induce operational errors These are OEM models designed according to the specifications of various equipment manufacturers.

Company：エムエス機器
Price：Other

Other semiconductor manufacturing equipment
Chiller

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Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

This is a chiller that can reduce the usage of valuable fluorinated solvents, which have become difficult to obtain recently.

Fluorinated solvents are widely used as temperature control circulating fluids in semiconductor manufacturing equipment and various measuring devices due to their high insulation properties. Additionally, they are suitable for cooling equipment in clean rooms because they are non-flammable, inert, and highly safe. There are specially designed chillers for these fluorinated circulating fluids. <Peltier Chillers> ThermoRack1201/1801 ThermoCube NIKOLA3K/5K <Refrigeration Chillers> M-75HFE - Compatible with many fluorinated solvents such as Fluorinert (FC-3283, etc.), Novec (HFE-7100, HFE-7200, etc.), Galden (HT-200, etc.), and Opteon (SF10, etc.) - The tank capacity and internal piping capacity are minimal, allowing for a reduction in the amount of expensive fluorinated solvents used, thereby lowering initial costs. - The sealed structure makes it difficult for valuable fluorinated solvents to evaporate, helping to reduce running costs. - The Peltier chiller models have high airtightness, preventing moisture from entering due to condensation. They are also suitable for fluorinated solvents that cannot be dehydrated with solvents like IPA.

Company：エムエス機器
Price：Other

Other environmental equipment
Other semiconductor manufacturing equipment
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Super Large Inverter Chiller RKE Series

Orion Machinery/Chiller. Achieves up to 57% energy-saving control.

■ Achieves up to 57% energy-saving control Operation is possible with minimal energy according to the load. *Compared to HB control at 30% load ■ High-precision liquid temperature control enabled by proprietary technology Control of the compressor rotation speed based on liquid temperature detection achieves a control range of ±0.2 to ±1.0℃ from the set temperature. *This may vary depending on load conditions, so please consult us if high precision is required. ■ Wide range of liquid temperature control available Liquid temperature settings can be made freely within the range of 15 to 30℃. ■ Standard external communication function equipped Temperature control is possible via RS232C and RS422. *Excludes RKE30000A-V and 30000A-VW.

Company：TOEI KAISHA, LTD.
Price：Other

air conditioning
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Large DC Inverter Chiller RKE-B Series (Air-Cooled / Water-Cooled)

Orion Machinery/Chiller. Achieving top-class energy savings in the industry with an inverter driver and dedicated controller!

■ Refrigeration Speed Control The DC inverter driver automatically determines optimal operation. ■ Fan Speed Control Automatically determines optimal operation using an inverter. ■ Pump Speed Control Minimizes the minimum rotation speed for necessary flow, reducing unnecessary water delivery. ■ Expanded Operating Ambient Temperature Range Designed to withstand harsh conditions up to 50°C in summer (optional selection required). It performs at its best even in factories where hot air tends to accumulate. Additionally, it can operate down to -20°C in winter (air cooling only), making it safe for outdoor installation in cold areas. ■ Expanded Specification Temperature Range (Liquid Temperature) The specification temperature range (liquid temperature) has been broadened to 3°C to 35°C, extending the low-temperature range further. *Using antifreeze allows operation down to 0°C. ■ Inverter for Pumps Not only does it contribute to energy savings in the refrigeration circuit, but it also does so in the water delivery circuit. By using an inverter to flow only the necessary amount, waste is eliminated without adjusting the bypass valve. Additionally, pressure settings can now be adjusted according to application needs. ■ Various Convenient Features Temperature accuracy of ±0.1°C, selectable pump control methods, intelligent touch panel, space-saving design, drip-proof structure (equivalent to IPX4), and quiet design.

Company：TOEI KAISHA, LTD.
Price：Other

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Free Cooling Chiller FCC15B1 (Air-Cooled)

Orion Machinery/Chiller. Maximizes the use of outside air. Achieves significant energy savings in annual power consumption.

■Maximizing the use of natural energy to achieve significant energy savings. In winter, cooling is performed solely through free cooling due to low outdoor temperatures. During the transitional period when outdoor temperatures are similar to the outlet water temperature of the eco-hybrid, cooling is primarily done through free cooling, and if the cooling capacity of free cooling is insufficient, a chiller will supplement the cooling. By actively utilizing free cooling, power consumption can be reduced, leading to energy savings. ■As a modular chiller, it can be installed in a maximum of 10 units (150HP). By adopting a pressure equalization pipe structure in the water tank, it has become possible to install multiple units (pressure equalization pipes are required for on-site installation. Please consult us for details). Even if the customer's load increases, it can be expanded in increments of 37kW*. Expansion can be done at minimal cost* based on rated cooling capacity. ■Expanded operating temperature range from -20 to 45℃. By adopting a brine indirect cooling method for cooling through free cooling, it can now be used in colder regions. ■Liquid temperature setting range is 5 to 35℃. It can be used for a wide range of applications. ■Adoption of cationic electrophoretic painting. The heat exchangers for the fan cooler are treated with cationic electrophoretic painting to improve corrosion resistance. The exterior is powder-coated to enhance corrosion resistance.

Company：TOEI KAISHA, LTD.
Price：Other

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Small water tank DC inverter chiller RKE series (air-cooled, water-cooled)

Pursuit of energy saving and high-precision temperature control high-spec model chiller.

- Achieves over 30% energy savings and high precision control with a temperature control accuracy of ±0.1℃ through compressor rotation control (compared to our conventional models). - Balances the conflicting technologies of energy savings and high precision. - Allows for up to 65% energy savings. - Realizes high precision control of ±0.1℃* (*when load and ambient temperature are stable). - Achieves a wide range. - The operation plate is angled to improve operability and visibility. - The water tank is positioned at the top, making water supply and checking/cleaning the water quality inside the tank very easy. - The dust filter for the condenser can also be easily attached and detached with one touch (air-cooled only).

Company：TOEI KAISHA, LTD.
Price：Other

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Water-soluble coolant temperature control device Coolant Chiller RCC (air-cooled)

Just connect the piping to the tank! Prepare the piping unit as an accessory for even faster plumbing work.

- Control the coolant liquid temperature within ±0.5℃ of the set temperature, contributing to improved machining accuracy. - Energy-saving operation with DC motor and inverter control, reducing coolant liquid evaporation loss by half. - Suppression of bacterial growth, reduction of decay and odor, and improvement of the working environment. - Easy installation even with a shallow tank due to the circulation system. - Energy-saving and high-precision control achieved with DC inverter control. - Structure allows for easy disassembly and cleaning of the cooler.

Company：TOEI KAISHA, LTD.
Price：Other

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Super Cool Chiller for Ultra-Low Temperature SC-60α

This is a super low-temperature chiller specifically for fluorine-based heat transfer fluids, with a wide temperature range of -60°C to +40°C, suitable for a broad range of operating temperatures.

【Features】 ■ Wide operating temperature range from -60℃ to +40℃. ■ Stable cooling performance even at ultra-low temperatures. ■ Designed for closed circuits, exclusively for fluorinated heat transfer fluids. ■ Uses a magnetic type seal-less pump with no liquid leakage. ■ Inverter control.

Company：タイテック
Price：Other

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Cooling Equipment Comprehensive Catalog

Various cooling devices for general industrial machinery and small sizes, featuring a wide range of applications, characteristics, and functions are listed.

This catalog introduces the cooling devices handled by Maruka Corporation. It features a rich lineup for general industrial machinery, electrical discharge machines, laser processing machines, and more. It also includes descriptions of features and functions, making it a useful reference when considering implementation. Please take a moment to read it. 【Featured Products (Partial)】 ■ Chillers for General Industrial Machinery ■ Compact Chillers ■ Chillers for Electrical Discharge Machines ■ Chillers for Laser Processing Machines ■ Cutting Fluid Cooling Devices (Circulating Type) *For more details, please refer to the PDF materials or feel free to contact us.

Company：マルカ
Price：Other

Cooling system
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Compact chiller

This is a compact rapid cooling water device designed for 100V specifications. It efficiently produces stable cold water due to its five-sided cooling system. The effective internal dimensions are 520×520×H265mm, while the external dimensions are 750×750×H800mm, making it a very compact cooling device. The refrigeration unit is built-in and equipped with casters, making it easy to move and install. Additionally, the insulated lid features a control panel, bringing everything together in one unit. Since it operates on a circulation system, it also contributes to water conservation.

Company：KE・OSマシナリー
Price：Other

Food Processing Equipment
Food environmental hygiene/contamination prevention equipment
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Air-cooled chiller (outdoor type) that does not require cooling water piping [MCA series]

High-performance tanked air-cooled chiller that achieves simplification and energy savings.

Wide temperature control range High-performance, simplified, and energy-saving tank-type air-cooled chiller For more details, please contact us or refer to the catalog.

Company：レイケン本社、南関東営業所、大阪支店、中部営業所、茨城工場、大阪工場
Price：Other

Cooling system
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Mold Cooling Device

Improved productivity through stable supply of cooling water temperature! Ideal for cooling water temperature management.

This product is a packaged type that meets various cooling needs. The stable supply of cooling water temperature improves productivity. It is also suitable for managing the cooling water temperature of processing machines, testing machines, and molding machines. We offer a wide range of models from small to large, both water-cooled and air-cooled. The use of new refrigerants contributes to environmental protection. 【Features】 - Packaged chiller series that meets various needs - Environmentally friendly new refrigerant R407C adopted - Reduction of cycle time - Shell and tube design for the condenser, considering maintenance functions - Standard equipped with a 4-system manifold *For more details, please feel free to contact us.

Company：ナックス開発部
Price：Other

Cooling system
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TELEMARK Cryochiller

It will help with quick pump-down and improvement of membrane quality.

Rapid cooling, rapid heating Effectively removing moisture from the deposition equipment is an essential challenge for vacuum deposition. The TELEMARK cryochiller series incorporates the latest technological advancements in cryochillers.

Company：VISTA
Price：1 million yen-5 million yen

Cooling system
Vacuum Equipment
Other physicochemical equipment
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Ultra-compact water thermal source heat pump/water-cooled chiller 'BLACKBOX'

The total cost is significantly different! This will become a concept that greatly changes weight design in facility and building construction.

The "BLACKBOX" is a compact water heat source heat pump (water-cooled chiller) that is very advantageous for handling on-site due to its small size and lightweight. Internally, it is designed to thoroughly avoid failures by eliminating four-way valves, allowing for cold and hot water output without switching (controlled on the piping side as needed). To minimize on-site costs, the refrigerant gas pathway is kept to a minimum, making it easy for equipment construction companies unfamiliar with refrigeration units to install. 【Features】 ■ The number of necessary parts, size, weight, and operational stability vary greatly. ■ All on-site costs can be reduced, resulting in significantly different total costs. ■ Reduces weight load in architectural design. ■ Suitable size for extremely small spaces. ■ Multiple units can be installed. *For more details, please refer to the PDF materials or feel free to contact us.

Company：ＭＤＩ
Price：Other

Other mounting machines
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Air-cooled inverter eco chiller MC-V Series

It is an energy-saving, high-efficiency inverter chiller.

1. Energy-saving realization (It is possible to reduce annual power consumption by approximately 30% by equipping a high-efficiency DC brushless inverter compressor). 2. Precise temperature control and high responsiveness to varying loads (During stable load conditions, stable chilled water supply within ±0.1℃ of the set water temperature is achieved. High-performance inverter control allows operation from 20% to 100% load). 3. Wide range of chilled water supply temperatures (Stable supply is possible over a wide range of 3℃ to 30℃ at the chiller outlet water temperature. It can operate year-round at ambient temperatures from -5℃ to 43℃). 4. Simple system with cost savings and high reliability. 5. Space-saving achieved through compact continuous installation.

Company：メイワ
Price：Other

Cooling system
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Other processing machines
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Chiller "Air-Cooled Inverter Eco Chiller"

Eco chiller pursuing energy saving and precise temperature control.

The "Air-cooled Inverter Eco Chiller" can reduce annual power consumption by approximately 30% due to the high-efficiency DC brushless inverter compressor. (CO2 emissions are reduced by about 30%) During stable load conditions, it can provide a stable supply of chilled water within a temperature range of ±0.1℃ of the set water temperature. It can stably supply chilled water over a wide range of outlet water temperatures from 3℃ to 30℃. For more details, please download the catalog.

Company：メイワ
Price：Other

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Chiller "Water-cooled Inverter Chiller"

Water-cooled eco chiller pursuing energy saving and precise temperature control.

The "water-cooled inverter eco chiller" can reduce annual power consumption by approximately 50% due to the high-efficiency DC brushless inverter compressor. (CO2 emissions are reduced by about 50%) During stable load conditions, it can provide a stable supply of chilled water within a temperature range of ±0.1℃ of the set water temperature. It can stably supply water at a wide range of outlet temperatures from 3℃ to 30℃. For more details, please download the catalog.

Company：メイワ
Price：Other

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Chiller: "Water-cooled brine inverter chiller"

Stable supply over a wide range of -10℃ to 10℃. Water-cooled brine eco-chiller pursuing energy savings and precise temperature control.

The water-cooled brine inverter eco-chiller can provide stable supply over a wide range of outlet water temperatures from -10°C to 10°C. With the installation of a high-efficiency DC brushless inverter compressor, it can save approximately 50% of annual power consumption (reducing CO2 emissions by about 50%). Additionally, under stable load conditions, it can provide stable chilled water supply within ±0.1°C of the set water temperature. *For more details, please download the catalog or contact us.

Company：メイワ
Price：Other

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Low GWP refrigerant chiller "RJ-XA type"

We would like to introduce our semiconductor manufacturing equipment chiller, the 'RJ-XA model'. It uses a low GWP refrigerant (R513A) that complies with global environmental regulations. It also achieves reduced power consumption through inverter control. Additionally, as an optional specification, it is available in a version that does not use copper or brass materials in the fluid contact parts, which helps reduce the risk of corrosion. 【Features】 ■ Low GWP refrigerant R513A adopted (GWP = 629) ■ Precise temperature control ■ Energy-saving ■ Space-saving ■ Copper and brass-free (optional) *For more details, please download the PDF or feel free to contact us.

Company：荏原製作所
Price：Other

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Air-cooled heat pump chiller "DT-RIII"

Energy-saving, space-saving, and construction-saving; can be installed in limited spaces! High-capacity modular chiller.

The "DT-RIII" is an air-cooled heat pump chiller that can expand the intake temperature during cooling operation up to a maximum of 52°C. It is available in header-integrated type, pump-integrated type, and pump-less type, allowing for selection based on design and construction methods. Additionally, it features high efficiency and large capacity, along with low noise levels. Depending on the installation environment, noise mitigation measures can also be simplified. 【Features】 ■ Expands the intake temperature during cooling operation up to a maximum of 52°C ■ Adoption of R32 refrigerant and reduction of refrigerant charge significantly lowers environmental impact ■ Equipped with a new type of compressor, achieving top-class cooling COP ■ Enhanced salt damage resistance of the air-side heat exchanger ■ Available in header-integrated type, pump-integrated type, and pump-less type *For more details, please refer to the PDF materials or feel free to contact us.

Company：藤川伝導機
Price：Other

Chiller
Cooling system
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Small Water Tank Chiller Catalog

We accommodate the specifications and prices that customers potentially seek with three models of chillers!

This catalog introduces three models of "small water tank chillers." We feature the high-spec model "RKE series," which offers energy-saving, high-precision temperature control, and advanced functionality, as well as the mid-grade models "RKS-JM/RKS-GM series" and the economical model "RKS-J series," including specifications and dimensional drawings. Additionally, we provide application information by series and pre-installation materials, making it easier to reference when selecting products. [Contents (partial)] ■ Selectable Orion small water tank chillers ■ Application information by series ■ RKE series ■ RKS-JM series ■ RKS-GM series *For more details, please refer to the PDF materials or feel free to contact us.

Company：藤川伝導機
Price：Other

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Thermochiller "HRS400 Series"

Adopts a submersible pump (without mechanical seals)! The operating status of the chiller can be monitored on a single screen.

The HRS400 Series is a standard type of thermochiller. It is air-cooled and has a cooling capacity of 38 kW, with a set temperature range of 5 to 35°C. The maximum ambient temperature for use is 45°C, and the temperature stability is ±0.1°C, with a waterproof structure rated IPX4. Additionally, the adoption of a touch panel has improved the product's settings, operation, and visibility. 【Specifications (partial)】 ■ Cooling capacity: 38 kW ■ Power supply ・3-phase 380–415V (50Hz/60Hz) ・3-phase 460–480V (60Hz) ■ Set temperature range: 5–35°C ■ Maximum ambient temperature for use: 45°C *For more details, please download the PDF or feel free to contact us.

Company：藤川伝導機
Price：Other

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Thermal chiller for the semiconductor industry

The refrigerant used is non-toxic and non-flammable, so there are no air transport restrictions! It is possible to refill the circulating liquid from the front.

We would like to introduce our thermochillers designed for the semiconductor industry. These chillers are compatible with non-fluorinated (CO2 refrigerant) and feature a slim design that allows for efficient placement. They do not require simple inspections based on the Fluorocarbon Emission Control Law. Additionally, there are no costs for the recovery or disposal of fluorocarbons. 【Features】 ■ GWP: 1 ■ Air transportable ■ 21% reduction in footprint ■ Improved workability ■ Zero fluorocarbon management workload ■ Zero costs for fluorocarbon recovery and disposal *For more details, please download the PDF or feel free to contact us.

Company：藤川伝導機
Price：Other

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Air-Cooled Heat Pump Chiller "DT-RIII" Comprehensive Catalog

Energy-saving, space-saving, and construction-saving! A large-capacity modular chiller that can be installed in limited spaces.

This catalog introduces the air-cooled heat pump chiller "DT-RIII" compatible with R32 refrigerant. We offer heat pump and cooling-only models, including "40/50/60/70 horsepower," as well as "80 horsepower," "Cool Toughness specification," "Heating Enhancement specification," and "Irrigation specification" in our lineup. It is a useful reference, so please take a moment to read it. 【Featured Products】 ■ 40/50/60/70 horsepower ■ 80 horsepower (cooling only) ■ Cool Toughness specification (60 horsepower cooling only) ■ Heating Enhancement specification (40, 50, 60 horsepower heat pumps only) ■ Irrigation specification (compatible with all horsepower) *For more details, please download the PDF or feel free to contact us.

Company：藤川伝導機
Price：Other

Chiller
Refrigeration equipment/chiller
Chiller

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[Chira] The ESL-60 series, pursuing efficiency and energy saving.

A new temperature management system that combines "efficiency" and "savings."

We would like to introduce the "ESL Series" multi-channel chiller, which combines energy efficiency and energy saving, from ATS Japan Co., Ltd. ■ A model with excellent energy efficiency thanks to hot gas bypass ■ The dual-channel model allows one chamber to be handled by a single unit! ■ Slim body with a width of 450mm ATS Japan's chillers have a proven track record primarily in the semiconductor industry. Based on our experience with thousands of installations, we can also customize solutions for other industries such as food, medical, and scientific fields according to your needs. We will propose the optimal solution tailored to your usage environment and application. Please feel free to contact us.

Company：ATSジャパン
Price：Other

Temperature and Humidity Control
Heating device
Etching Equipment
Chiller

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Chiller Product List and Ranking from 50 Manufacturers, Suppliers and Companies | IPROS GMS

Chiller Manufacturer, Suppliers and Company Rankings

Chiller Product ranking