This is a chiller designed for semiconductor manufacturing equipment.
Many devices used in the semiconductor manufacturing process require cooling equipment (chillers) to remove the heat generated and maintain a constant temperature. Thermo Fisher Scientific's chillers for semiconductor manufacturing are designed to provide: - High productivity - Long-term reliability - Simple operability that does not induce operational errors These are OEM models designed according to the specifications of various equipment manufacturers.
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basic information
MX500 This is a water-cooled circulating cooling device with a maximum cooling capacity of 19.3 kW and a temperature stability of 0.5°C. It is equipped with standard options such as EMO (Emergency Stop Button) and LOTO (Lockout/Tagout) to comply with SEMI standards required in clean rooms of semiconductor manufacturing plants. NESLAB 3 (SYSTEM 3) This is a circulating cooling device that uses a water-to-water heat exchange method, cooling the heat absorbed by circulating water with tap water or factory water, without using a refrigeration cooling system. It provides a maximum cooling capacity of 50 kW with a temperature stability of ±1.0°C.
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Applications/Examples of results
- Plasma Etcher - Asher - CVD (Chemical Vapor Deposition) - PVD (Physical Vapor Deposition) - Ion Implantation - CMP (Chemical Mechanical Polishing) - Tester - High-Speed Thermal Processing
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Company information
MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892