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  6. Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

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last updated:Jun 16, 2022

エムエス機器
エムエス機器
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This is a chiller that can reduce the usage of valuable fluorinated solvents, which have become difficult to obtain recently.

Fluorinated solvents are widely used as temperature control circulating fluids in semiconductor manufacturing equipment and various measuring devices due to their high insulation properties. Additionally, they are suitable for cooling equipment in clean rooms because they are non-flammable, inert, and highly safe. There are specially designed chillers for these fluorinated circulating fluids. <Peltier Chillers> ThermoRack1201/1801 ThermoCube NIKOLA3K/5K <Refrigeration Chillers> M-75HFE - Compatible with many fluorinated solvents such as Fluorinert (FC-3283, etc.), Novec (HFE-7100, HFE-7200, etc.), Galden (HT-200, etc.), and Opteon (SF10, etc.) - The tank capacity and internal piping capacity are minimal, allowing for a reduction in the amount of expensive fluorinated solvents used, thereby lowering initial costs. - The sealed structure makes it difficult for valuable fluorinated solvents to evaporate, helping to reduce running costs. - The Peltier chiller models have high airtightness, preventing moisture from entering due to condensation. They are also suitable for fluorinated solvents that cannot be dehydrated with solvents like IPA.

    Other semiconductor manufacturing equipmentOther environmental equipment
TR1201.png

Fluorine-based solvent compatible chiller, Peltier chiller, refrigeration chiller.

TR1201.png
TR1201.png
  • Related Link - https://www.technosaurus.co.jp/products_category/t…

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<ThermoRack 1201 / 1801> Set temperature: -10 to 80℃ / -15℃ to 70℃ Cooling capacity @20℃: 1320W / (H)1600W (M) 1800W 1 (L) 2000W Pump: 14Lpm@0.21MPa External dimensions (WxDxH) mm: 483 x 610 x 221 <Thermo Cube> Set temperature: 5 to 50℃ (optional -5℃ to 65℃) Cooling capacity @20℃: 200W to 600W@20℃ (6 models) Pump: 1Lpm@0.24MPa to 3Lpm@0.2Mpa (9 types) External dimensions (WxDxH) mm: 280 x 320 x 320 <NIKOLA3K / 5K> Set temperature: -10 to 80℃ Cooling capacity @20℃: (3K) 3000W / (5K) 5000W Pump: 38Lpm@0.55MPa External dimensions (WxDxH) mm: 566 x 711 x 897 <M-75HFE> Set temperature: -15 to 35℃ Cooling capacity @20℃: 1600W Pump: 11Lpm@0.42MPa External dimensions (WxDxH) mm: 413 x 610 x 664

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Applications/Examples of results

<Application> - Dry etching - Tester - Stepper - Electromagnet - Electron beam - Laser device

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Peltier Cooler Product Comprehensive Catalog

Peltier Cooler Product Comprehensive Catalog

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ThermoRack 1201

ThermoRack 1201

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ThermoRack 1801

ThermoRack 1801

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Peltier Chiller NIKOLA 3K / 5K

Peltier Chiller NIKOLA 3K / 5K

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Fluorine-based solvent chiller M-75HFE

Fluorine-based solvent chiller M-75HFE

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Fluorine-based solvent compatible chiller <Peltier type, refrigeration type>

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Fluorinated solvents are widely used as temperature control circulating fluids for semiconductor manufacturing equipment and various measuring instruments due to their high insulation properties. Additionally, they are non-flammable, inert, and highly safe, making them suitable for cooling devices in clean rooms. This fluorinated circulating fluid is paired with specially designed chillers. <Peltier Chillers> ■ThermoRack1201/1801 ■ThermoCube ■NIKOLA3K/5K <Refrigeration Chillers> ■M-75HFE For more details, please refer to the related product pages or PDF materials below.

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エムエス機器

エムエス機器

Industrial Machinery

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MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892

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