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Create materials and someday create the future.
This is an ultra-precise vacuum chuck made using Poafree-type ceramic materials, pursuing ultimate planar smoothness. It accommodates various types of wafers and guarantees smoothness even in the currently mainstream φ300mm size.
Create materials and someday create the future.
Through planar smoothness and special manufacturing techniques, we provide high productivity and reliability in manufacturing processes that require full adhesion of wafers and large substrates, with excellent adsorption characteristics and high durability. The porous body offers flexibility in the selection of materials and pore size according to user needs.
