Inline Coating System (FCVA)
Combination with spatter is also possible! Inline FCVA equipment suitable for mass production.
We would like to introduce our "Inline Coating System (FCVA)." An inline FCVA device suitable for mass production. The number of chambers can be selected as desired. It can also be combined with sputtering. It features a substrate cleaning mechanism using a heater and ion beam. 【Features】 ■ Equipped with FCVA and sputtering ■ Substrate cleaning mechanism using a heater and ion beam ■ Choice of DC, MF, or RF sputtering power supplies ■ Self-rotating sample holder ■ Number of chambers can be selected as desired ■ Maximum substrate size: φ900mm x 500mm(H) *For more details, please feel free to contact us.
- Company:株式会社ナノフィルムテクノロジーズ ジャパン
- Price:Other