Combination with spatter is also possible! Inline FCVA equipment suitable for mass production.
We would like to introduce our "Inline Coating System (FCVA)." An inline FCVA device suitable for mass production. The number of chambers can be selected as desired. It can also be combined with sputtering. It features a substrate cleaning mechanism using a heater and ion beam. 【Features】 ■ Equipped with FCVA and sputtering ■ Substrate cleaning mechanism using a heater and ion beam ■ Choice of DC, MF, or RF sputtering power supplies ■ Self-rotating sample holder ■ Number of chambers can be selected as desired ■ Maximum substrate size: φ900mm x 500mm(H) *For more details, please feel free to contact us.
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【Applications】 ■ DLC (TAC) film ■ Metal film ■ Metal film / DLC (TAC) laminated film ■ Ceramic film *For more details, please feel free to contact us.
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Our development technology has obtained international patents and plays a significant role in society. The super DLC (hydrogen-free ta-C film) produced by the FCVA method is formed through a completely different process compared to DLC films generated by existing PVD and CVD methods. Additionally, there is a composite metal film called "Micc film" that excels in release properties between metals and plastics. Coating films produced by the FCVA method are currently being rapidly adopted in fields such as the hard disk industry, precision machinery industry, and semiconductor industry, and future expansion into the automotive industry, nanoimprint industry, and biomaterials field is anticipated.
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