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Hexapod Product List

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H-840.G2IHP type high-precision hexapod stage

H-840.G2IHP type high-precision hexapod stage

Based on customer feedback, we have improved the driving precision of the Hexapod! It now enables step movements of 40 nm on the XY axis and 20 nm on the Z axis.

We have been providing hexapod stages for over 20 years, and based on customer feedback, we have released a hexapod with enhanced drive precision! It enables step movements of 40 nm on the XY axis and 20 nm on the Z axis. It can meet the highest demands for alignment and positioning applications in production and measurement technologies. <Specifications> - Drive Axes: 6 axes - Travel Range: XY = ±50mm, Z = ±25mm, θxθy = ±15 degrees, θz = ±30 degrees - Minimum Movement: XY = 40nm, Z = 20nm, θxθy = 0.2µrad, θz = 0.4µrad - Maximum Speed: 2.5mm/second, 30mrad/second - Load Capacity: 40Kg (horizontal) - Arbitrary rotation center setting For more details, please contact us or refer to the catalog.

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Bed size hexapod positioning stage

Bed size hexapod positioning stage

Accurate 6-axis positioning for patients undergoing radiation therapy.

Rectangular bed-shaped hexapod design. The PI multi-axis motion and positioning solution hexapod (derived from the Greek word for six legs) is a motion platform controlled by six actuators (supports). They all operate simultaneously on a single platform, enabling movement in six degrees of freedom.

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High-precision small hexapod H-811.I2 parallel kinematic

High-precision small hexapod H-811.I2 parallel kinematic

High rigidity & high precision, compact 6-axis stage compatible with vacuum.

The H-811.I2 is a compact hexapod capable of high-precision positioning across all six axes. In addition to a movement range of ±17mm in the XY plane and ±6.5mm in the Z direction, it allows for rotation control of ±21°. Thanks to its parallel kinematic design, interference and errors are minimized, ensuring stable operation. It is particularly reliable for operation in vacuum or confined spaces, excelling in precision fields that require reproducibility and rigidity. It can support loads of up to 5kg.

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Compact hexapod H-825 with a load capacity of up to 30kg.

Compact hexapod H-825 with a load capacity of up to 30kg.

Designed for high load applications with a load capacity and rigidity of 30kg.

The H-825, with a Z-axis reproducibility of ±0.1µm and a high-rigidity design, is suitable for precise operations in semiconductor manufacturing and optical adjustment fields. It has a maximum load capacity of 30kg and can operate immediately without initialization due to its brushless DC gear motor drive and absolute rotary encoder. It achieves stable high-precision positioning and posture control.

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Parallel Kinematic Hexapod H-811

Parallel Kinematic Hexapod H-811

A compact yet high-precision reference-class 6-axis positioning system.

A hexapod with 6 degrees of freedom, featuring a parallel kinematic design that is more compact and rigid than a single-axis kinematic system. It offers a large dynamic range, operates without cables, and provides high reliability. Additionally, it allows for user-defined pivot point settings via software. Main body dimensions: ultra-compact design of φ136×115mm, direct drive type using brushless DC motors (BLDC) and long-life ball screws. A vacuum-compatible version (10^-6 hPa) is also available for use in optical alignment, automation, quality assurance testing, and testing equipment. 【Features】 ■ Minimum hexapod (vacuum option available) ■ Travel range: 34mm / 42° ■ Load capacity: 5kg ■ Actuator resolution: 40nm ■ Minimum incremental motion: 0.2μm ■ Reproducibility: ±0.1μm ■ Includes scanning algorithm for fiber optical alignment ■ Arbitrary setting of pivot point (rotation center) is possible *For more details, please download the PDF or contact us.

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[For the manufacturing industry] Small Hexapod H-811.I2

[For the manufacturing industry] Small Hexapod H-811.I2

Optimize the manufacturing process with a compact yet high-precision 6-axis positioning system.

In positioning tasks within the manufacturing industry, high precision and reliability are required. Particularly in the precise assembly and inspection processes that influence product quality, fine and accurate positioning is essential. Traditional single-axis positioning systems have faced challenges due to the time and effort required for complex multi-axis adjustments. The Parallel Kinematic Hexapod H-811.I2 addresses these issues with its design featuring six degrees of freedom. Additionally, its compact design is a significant advantage due to its small footprint. 【Application Scenarios】 - Assembly of precision components - Positioning in inspection equipment - Fiber optic alignment - Automation systems 【Benefits of Implementation】 - Improved product quality through high-precision positioning - Reduced work time and increased efficiency - Adaptability to diverse applications - Stable operation due to high reliability

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[For Research] Parallel Kinematic Hexapod H-811.I2

[For Research] Parallel Kinematic Hexapod H-811.I2

A compact yet high-precision reference-class 6-axis positioning system.

In experimental research fields, precise positioning is essential. Particularly when conducting fine and high-precision measurements, the accuracy of positioning significantly affects the experimental results. Low positioning accuracy can lead to inaccurate data and may compromise the reproducibility of the experiments. The Parallel Kinematic Hexapod H-811.I2 enhances the quality of research experiments through its high precision, rigidity, and flexible pivot point settings. 【Usage Scenarios】 - Optical alignment - Automation - Quality assurance testing - Use in testing equipment 【Benefits of Implementation】 - Improved experimental accuracy through high-precision positioning - Achievement of highly reproducible experimental results - Adaptability to various experiments

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Hexapod H-825 for Research and Experiments

Hexapod H-825 for Research and Experiments

30kg load capacity and ±0.1µm reproducibility 6-axis precision hexapod

The H-825 Hexapod is a 6-degree-of-freedom parallel kinematics stage designed for research and experimental applications. With a reproducibility of ±0.1µm (Z-axis) and a high-rigidity structure, it is suitable for optical experiments and precision measurements where even minor positional errors are unacceptable. It achieves stable positioning under high load conditions with a maximum load capacity of 30kg and brushless DC gear motor drive. It is ideal for high-precision alignment and sample position control applications. Please refer to the catalog for detailed specifications. 【Application Scenes】 - Optical experiments / Laser alignment - Precision measurement and evaluation equipment - Semiconductor research and development - Sample stage / Optical system adjustment 【Benefits of Implementation】 - High-precision alignment through simultaneous control of 6 axes - Vibration suppression and stability improvement due to high-rigidity design - Immediate operation with built-in absolute encoder that requires no initialization

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Hexapod H-850 for Research and Development

Hexapod H-850 for Research and Development

±0.2µm reproducibility, heavy-load compatible model with absolute encoder

In the field of research and development, experimental platforms require precise positioning and stable operation. This is especially important for experiments that require fine adjustments or when handling heavy samples, where high accuracy, rigidity, and immediate acquisition of positional information are crucial. The H-850 has been developed to meet these demands. 【Application Scenarios】 - Optical experiments - Material testing - Precision measurement 【Benefits of Implementation】 - Improved experimental accuracy through high-precision positioning - Reduced positioning time with absolute encoders - Capability to accommodate a wide range of experiments with a maximum load capacity of 250 kg

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Hexapod H-850 for Space Development

Hexapod H-850 for Space Development

±0.2µm reproducibility and 6-axis high precision control. For precise alignment of astronomical optical systems.

The H-850 Hexapod is a 6-degree-of-freedom parallel kinematics positioning system designed for astronomical research applications. It features high reproducibility of ±0.2µm and is equipped with absolute encoders, enabling high-precision position control without the need for homing. Its wide range of movement and rotation makes it suitable for integration into the precise alignment of telescope optical systems and detectors. Please refer to the catalog for detailed specifications. 【Usage Scenarios】 - Optical alignment of astronomical telescopes - Precision testing within vacuum chambers - Ground evaluation tests of satellite-mounted equipment 【Benefits of Implementation】 - High-precision optical adjustments with ±0.2µm reproducibility - Complex attitude control through simultaneous 6-axis control - Immediate operation with absolute encoders - Capability to accommodate large optical systems with a wide range of motion

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Hexapod H-840.G2IHP for Life Sciences

Hexapod H-840.G2IHP for Life Sciences

High-precision hexapod supporting advanced bioimaging with 6 degrees of freedom control.

In the field of life sciences, advanced imaging and analysis require precise three-dimensional positioning and stable alignment of samples, which significantly impact the reproducibility of acquired data and the accuracy of analyses. Particularly in cutting-edge bioimaging devices such as multiphoton microscopes and light sheet microscopes, precise control in six degrees of freedom is essential. The H-840.G2IHP hexapod adopts a high-rigidity design based on parallel kinematics, achieving six degrees of freedom positioning with nanometer resolution. Its high-speed response capability allows for complex alignment operations and 3D position adjustments. It is also suitable for research applications and integration into advanced bioanalysis devices. 【Use Cases】 - Sample positioning in multiphoton microscopy - 3D alignment in light sheet microscopy - High-precision adjustments for bioimaging devices - Six degrees of freedom positioning for biological samples 【Benefits of Implementation】 - High-precision positioning with nanometer resolution - Flexible alignment through simultaneous control of six degrees of freedom - Stable observation environment due to high-rigidity structure - Easy integration into complex optical systems

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Hexapod H-840.G2IHP for Optical Applications

Hexapod H-840.G2IHP for Optical Applications

High-rigidity hexapod achieving 6 degrees of freedom alignment with nanometer resolution.

In the fields of optical systems and precision measurement, sub-micron level alignment and six degrees of freedom control significantly impact device performance and measurement accuracy. Particularly in laser optical systems, interferometers, and photonics evaluation devices, a high-rigidity and high-resolution alignment mechanism is required. The H-840.G2IHP hexapod features high rigidity and dynamics due to its parallel kinematics structure, achieving six degrees of freedom positioning with nanometer resolution. Its compact design also makes it suitable for integration into optical benches and inspection devices. 【Application Scenarios】 - High-precision alignment of optical systems - Position adjustment of laser optical systems - Interferometers and precision measurement devices - Evaluation of photonics devices 【Benefits of Implementation】 - Efficient alignment through simultaneous control of six degrees of freedom - Precise positioning with nanometer resolution - Stable measurement environment due to high-rigidity structure - Easy integration into optical devices

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Parallel Kinematic Hexapod H-840 with a load capacity of 30 kg

Parallel Kinematic Hexapod H-840 with a load capacity of 30 kg

High-precision 6-axis control that achieves a maximum load capacity of 30kg and a reproducibility of ±0.1µm.

The H-840 is a high-precision hexapod that employs a Stewart platform structure and is driven in parallel by six actuators. It achieves flexible motion with a Z-axis range of ±25mm, X/Y direction of ±50mm, and rotation of ±30°, enabling advanced position control for applications such as optical alignment and micromanipulation. It can accommodate loads of up to 30kg and features a position repeatability of ±0.1µm along with high control accuracy.

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Compact design capable of performing 6-axis motion for optical components.

Compact design capable of performing 6-axis motion for optical components.

Addressing the demanding alignment process in photonics.

In the optical components industry, precise and demanding positioning is a crucial factor that influences quality. Our H-815 industrial hexapod achieves high-precision positioning, contributing to the improvement of product quality. 【Application Scenarios】 - Addressing demanding alignment processes in photonics - Alignment of extremely small components such as lenses and other optical parts 【Benefits of Implementation】 - Increased productivity in complex manufacturing and measurement processes - Alignment of small components - Long-life design capable of handling high-load cycles

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Industrial Hexapod for Laser Micromachining

Industrial Hexapod for Laser Micromachining

Performing highly reliable positioning in various directions.

In laser microprocessing, even slight positional shifts or posture errors can significantly affect processing quality. The H-815 hexapod maintains optimal conditions for processing points, focal positions, and workpiece posture through sub-micron precision positioning and high reproducibility achieved by simultaneous control of six axes. This ensures stable processing quality. 【Application Scenarios】 - Reduction of processing variation - Integration into semiconductor manufacturing equipment - High-precision inspection processes 【Benefits of Implementation】 - Stabilization of manufacturing processes - Improved reproducibility of fine patterns - Stable operation 24 hours a day, 365 days a year

  • Testing Equipment and Devices
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Hexapod H-825 for Manufacturing Industry

Hexapod H-825 for Manufacturing Industry

30kg load capacity; ±0.1µm reproducibility of a 6-axis high-rigidity hexapod.

The H-825 Hexapod is a 6-degree-of-freedom parallel kinematics stage suitable for integration into manufacturing equipment and high-precision alignment applications. With a reproducibility of ±0.1µm (Z-axis) and a high-rigidity structure, it achieves stable precision positioning even with heavy workpieces. With a maximum load capacity of 30kg and brushless DC gear motor drive, it supports high-precision adjustment processes in production lines and inspection equipment. Please refer to the catalog for detailed specifications. 【Application Scenarios】 - High-precision alignment in semiconductor equipment - 6-axis position adjustment of optical components - Integration into inspection and measurement equipment - Precision assembly processes 【Benefits of Implementation】 - High-precision alignment through simultaneous 6-axis control - Vibration suppression and stable operation due to high-rigidity design - No initialization required with built-in absolute encoder for immediate operation - Capable of handling large workpieces with a 30kg load capacity

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Hexapod H-850 for Manufacturing Industry

Hexapod H-850 for Manufacturing Industry

High-precision positioning of heavy objects up to 250 kg. Equipped with an absolute encoder.

In the movement of parts in the manufacturing industry, accurate positioning and stable operation significantly affect production efficiency and quality. Especially in the case of heavy components or precise assembly processes, micron-level accuracy is required. Misalignment and vibrations can lead to the occurrence of defective products and delays in the process. The H-850 addresses these challenges with a maximum load capacity of 250 kg and a repeatability of ±0.2µm. By incorporating an absolute encoder, it reduces the positioning time at startup, contributing to increased productivity. 【Usage Scenarios】 - Alignment of heavy components - Supply of parts to robots - Positioning of parts in testing equipment 【Benefits of Implementation】 - Improved quality through high-precision positioning - Increased productivity through fast and stable operation - Reduced startup time with the absolute encoder

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