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Indicator Product List

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Plasma Indicator [PLAZMARK for Ar Cleaning]

Plasma Indicator [PLAZMARK for Ar Cleaning]

Achieving high sensitivity! An indicator capable of soft Ar plasma treatment and short-time processing.

The "PLAZMARK Ar Cleaning Type" is a plasma indicator that can be used to evaluate the effectiveness of cleaning and pretreatment processes by utilizing color materials that are sensitive to discoloration in strongly ionic plasmas, such as argon plasma. Additionally, a high-sensitivity type indicator has been commercialized to enhance the discoloration sensitivity that was previously only available in the "Ar Cleaning Type." As a result, it is now possible to use this indicator even for soft Ar plasma treatments and short-duration treatments, which were previously difficult to evaluate. 【Features】 ■ Achieves high sensitivity ■ Simple operation by just placing it in the device ■ Immediate color judgment after processing ■ Gradual color changes allow for detailed evaluation of in-plane distribution ■ Reduces costs as expensive evaluation equipment is not required *For more details, please refer to the catalog or feel free to contact us.

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Visualizing the effects of plasma treatment in color! Ceramic type

Visualizing the effects of plasma treatment in color! Ceramic type

It changes color continuously according to the intensity and duration of the plasma treatment, allowing the effects of the plasma treatment to be visualized in color.

As an evaluation tool for plasma treatment effects, "PLAZMARK(R)" has expanded its lineup since its launch in 2014 to meet customer needs. Now, as the first product for wafer processes that has been highly requested, we introduce the 'PLAZMARK(R) "Wafer Type" Ceramic Version'! It can be used for evaluating in-plane distribution in wafer processes such as etching and ashing of electronic devices. 【Features】 ■ Achieves high heat resistance (400℃) ■ Clean design suitable for processes such as LED and MEMS ■ Two types of substrates available: silicon and sapphire *For more details, please refer to the materials. Feel free to contact us with any inquiries.

  • Wafer

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Manage the plasma desmearing process without the hassle of weight measurement! PlasmaArk

Manage the plasma desmearing process without the hassle of weight measurement! PlasmaArk

The plasma indicator "PLAZMARKⓇ for Desmia" is compatible with typical O₂ + CF₄ gas! It is also suitable for powerful plasma treatment with high output for long durations!

The "PLAZMARKⓇ for Desmear" is a label-type indicator that can be applied to the plasma desmear of printed circuit board via holes. It can be used not only with batch-type plasma desmear devices but also with roll-to-roll plasma desmear devices, allowing for easy evaluation of etching amounts comparable to traditional methods through color changes. Additionally, it can be used for powerful plasma treatments with high output and long duration, which may exceed the range of other PLAZMARKⓇ products. 【Features】 ■ Two sensitivity options available ■ Flexible label type ■ Quantification possible with color difference meter ■ No cumbersome weight measurement required ■ Compatible with O2 + CF4 gas *For more details, please refer to the PDF document or feel free to contact us.

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PLAZMARK "Heat-Resistant Label" High Sensitivity Type

PLAZMARK "Heat-Resistant Label" High Sensitivity Type

Simple visualization of plasma treatment effects: New lineup of plasma indicator TMPLAZMARK with heat resistance of 200°C.

The Plasma Indicator TM (Product Name: PLAZMARK) has been well received since its launch two years ago as an evaluation tool that easily visualizes the effects of plasma treatment. Our product lineup has been gradually expanded to include "O2 (oxygen) cleaning," "heat-resistant labels," "Ar (argon) cleaning," and "atmospheric pressure plasma," depending on the process and usage environment. This time, we are launching a new lineup of PLAZMARK "heat-resistant" products, featuring a high-sensitivity discoloration type (Model No. 101) that has been highly requested. 【Features】 ■ Achieves high discoloration sensitivity. ■ Retains the characteristics of existing products. For more details, please contact us or download the catalog.

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High-cost equipment, no skilled labor required! Plasma indicator [Free sample]

High-cost equipment, no skilled labor required! Plasma indicator [Free sample]

A evaluation tool that detects radicals and ions and changes color! The previously labor-intensive confirmation process has become smoother, and the burden of implementation is not significant!

Isn't this the situation you are in? As utilization progresses in various fields... - Are you properly confirming the processing effects? - Is recipe development going smoothly? - Are you having trouble with adjustments after equipment maintenance? - Are you struggling with process management? - Are your customers requesting evidence of plasma treatment quality? The "Plasma Indicator(TM) PLAZMARK(R)" is an indicator for confirming the effects of plasma treatment using color materials that change color with plasma. It changes color in stages according to plasma density, allowing you to visualize the state of the plasma "in color." The color change is an irreversible reaction, so it can be recorded as a judgment record and used for process management. Additionally, the color change can be easily quantified, allowing for correlation with other measurement results (however, a colorimeter is required for quantification). ★ We are offering free samples. Please feel free to contact us. * For more details, please inquire or download the catalog.

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Is it an accurate plasma measurement? Case studies for solving problems in plasma measurement.

Is it an accurate plasma measurement? Case studies for solving problems in plasma measurement.

Are you able to make accurate plasma measurements? We will introduce various case studies related to plasma treatment, including evaluation, measurement issues resolution, and efficiency improvement. *Case study collection available.

Because it is invisible, we want to measure plasma accurately. This is a must-see proposal for those who have been measuring manually, aimed at improving measurement efficiency. 'PLAZMARK' is an indicator for confirming the effects of plasma treatment, using color materials that change color with plasma. It gradually changes color according to the intensity of the plasma treatment, allowing you to visualize the state of the plasma in "color." The color change can be easily quantified, and it is also possible to see correlations with other measurement results! (However, a color difference meter is required for quantification.) 【Introducing case studies by issue in PDF!】 - Defects occur about once a month. Procedures are instructed, but there is variation among workers. - Struggled with how to confirm whether the surface modification is uniform on 3D shapes. - Asked to investigate whether there are any issues with our own plasma equipment. - Pointed out variations in quality by line, and constantly busy responding to them every day. - The equipment for confirming the effects of plasma cleaning is expensive and cumbersome to measure. *Please download the PDF to view the case studies.

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Indicator "PLAZMARK Ar Cleaning Use" <Card Type>

Indicator "PLAZMARK Ar Cleaning Use" <Card Type>

Optimized for ionic plasma detection! A card-type device that can be easily installed in areas of interest.

The "PLAZMARK Ar Cleaning Use" is a card-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning. It can efficiently detect ionic plasma such as Ar and He, which are hard to detect with O2 cleaning. In mixed systems with radical-based plasma or gases that serve as radical sources, O2 cleaning is more suitable. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Available in three shapes to suit your needs ■ Widely usable in processes such as semiconductor back-end operations *For more details, please refer to the related links or feel free to contact us.

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What is the Plasma Indicator PLAZMARK?

What is the Plasma Indicator PLAZMARK?

Introducing an evaluation tool using functional color materials that change color due to radical ions.

We would like to introduce our plasma indicator, 'PLAZMARK'. This product is an evaluation tool that uses functional color materials that change color due to active species (radicals and ions) in the plasma. It continuously changes color according to the plasma intensity, allowing for a detailed assessment of the plasma treatment effect. 【Features】 ■ Continuously changes color according to plasma intensity ■ Allows for a detailed evaluation of the plasma treatment effect *For more details, please refer to the related links or feel free to contact us.

  • Plasma Generator
  • Evaluation Board

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Checks are easy, costs are compressed.

Checks are easy, costs are compressed.

Easily check visually in a short time! Here are the reasons why PLAZMARK is chosen.

The "PLAZMARK" we handle is a product that allows for easy checking and cost reduction. Until now, confirming the effectiveness of plasma cleaning required expensive equipment and was time-consuming for measurements, but with the plasma indicator, visual checks are possible. Anyone can easily and accurately check in a short amount of time, contributing to improved work efficiency and cost reduction. 【Features】 ■ Visual checks are possible ■ Anyone can easily and accurately check in a short amount of time ■ Contributes to improved work efficiency and cost reduction *For more details, please refer to the related links or feel free to contact us.

  • Plasma Generator
  • Evaluation Board

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[New Release] PLAZMARK Marker Type for Atmospheric Pressure Plasma

[New Release] PLAZMARK Marker Type for Atmospheric Pressure Plasma

Easy to confirm plasma effects on fine details and curved surfaces! Due to the excellent hiding power of the ink, it can be used on a variety of materials.

The "PLAZMARK Atmospheric Pressure Plasma" is a marker-type plasma indicator that takes the form of a writing instrument. It allows for easy visualization of plasma treatment on small or complex-shaped workpieces. Being a marker type, it is easy to use and helps reduce operational costs. Additionally, it can be used to confirm plasma treatment on flexible materials such as Roll to Roll by marking. 【Features】 ■ Marker type in the shape of a writing instrument ■ Can confirm plasma treatment in narrow areas ■ Can be used on small parts and dark-colored components ■ Can be used on curved surfaces like pipes ■ Easy to use and helps reduce operational costs *For more details, please download the PDF or feel free to contact us.

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Evaluation example of corona discharge using PLAZMARK atmospheric pressure plasma.

Evaluation example of corona discharge using PLAZMARK atmospheric pressure plasma.

Useful for evaluating processing distribution, which was difficult to determine with wet reagents! Introducing our technical data.

Three PLAZMARK labels were attached to plastic writing instruments and subjected to corona treatment, followed by visual inspection of the discoloration of the indicators and color difference measurement. As equipment, corona discharge was used for pre-treatment before printing on plastic writing instruments. Traditionally, a wet reagent was used for inspection at the start of operations, and if the values were outside the standard, the output value was increased, or the wire electrodes were cleaned and adjusted. As a result, the color difference was small, but it was possible to visually distinguish the intensity, making it useful for evaluating treatment distribution, which was difficult to assess with the wet reagent. [Evaluation] ■ Plasma Indicator: PLAZMARK Atmospheric Pressure Label No. 41 High Sensitivity ■ Color Difference Meter: Konica Minolta Fluorescent Spectrophotometer FD-5 (Measurement Light Source M1, Illumination System C Light Source, 2° Viewing Angle) *For more details, please refer to the related links or feel free to contact us.

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Visualization of Active Species Behavior (2) Influence of Substrate Bias

Visualization of Active Species Behavior (2) Influence of Substrate Bias

We present the results of examining the substrate bias dependence of discoloration in each indicator.

We will introduce the technical data from the Ar plasma treatment, where plasma indicators for O2 cleaning (No.1) and Ar cleaning (No.22) were installed on the electrode side of the substrate bias application. As the substrate bias increases (0 to 50W), the color difference of the Ar cleaning indicator, which is prone to discoloration by ions, significantly increases, while the O2 cleaning indicator, which discolors due to radicals, shows only a slight increase. It is believed that the Ar cleaning indicator is detecting the increased irradiation of Ar ions due to the bias. 【Discharge Conditions】 ■ Ar gas = 5Pa ■ Power = 80W ■ Time = 30sec *For more details, please refer to the related links or feel free to contact us.

  • Special labels, etc.

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Plasma Indicator "PLAZMARK Ultra High Sensitivity Type for Atmospheric Pressure"

Plasma Indicator "PLAZMARK Ultra High Sensitivity Type for Atmospheric Pressure"

Ultra-high sensitivity for atmospheric pressure plasma is here! Compatible with mild plasma.

The "PLAZMARK Ultra High Sensitivity Type for Atmospheric Pressure" is a plasma indicator with a short processing time. In a comparison of discoloration samples and color differences after repeated mild plasma treatment, the discoloration speed is more than three times faster than previous high sensitivity types. We offer two shapes: a "Long Label Type" that can be attached, and a "Sheet Type" that allows for distribution evaluation at once. 【Suitable for the following processes】 ■ Fast scan speed (short processing time) ■ Low plasma power ■ Does not discolor with the current high sensitivity No. 41 *For more details, please refer to the related links or feel free to contact us.

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Indicator "PLAZMARK Ar Cleaning Use" <Label Type>

Indicator "PLAZMARK Ar Cleaning Use" <Label Type>

Label type that can be attached like a sticker! Widely usable in semiconductor back-end processes and more.

The "PLAZMARK Ar Cleaning Use" is a label-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning methods. It can efficiently detect ionic plasma such as Ar and He, which are hard to detect with O2 cleaning. In addition to this product, we offer three shapes: a "card type" that can be easily installed in areas of interest, and a "sheet type" that can capture distribution over a large area. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Three shapes to choose from according to your needs ■ Widely usable in processes such as semiconductor back-end *For more details, please refer to the related links or feel free to contact us.

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Indicator "PLAZMARK Ar Cleaning Type" <Sheet Type>

Indicator "PLAZMARK Ar Cleaning Type" <Sheet Type>

Efficiently detectable ionic plasma that is difficult to detect with O2 cleaning!

The "PLAZMARK Ar Cleaning Use" is a sheet-type indicator that can efficiently detect ionic Ar plasma, which is difficult to detect with O2 cleaning. It can be used in a wide range of scenarios, including surface modification before plating and cleaning before underfill after component mounting. For plasma primarily composed of radicals or in mixed systems with gases that serve as radical sources, O2 cleaning is more suitable. 【Features】 ■ Optimized indicator for detecting ionic plasma ■ Three shapes available to choose from according to your needs ■ Widely usable in processes such as semiconductor back-end operations *For more details, please refer to the related links or feel free to contact us.

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