Nanometer positioning device [Exhibited at Positioning EXPO]
For improved inspection efficiency! This is a positioning device with nanometer resolution and excellent reproducibility, featuring a built-in linear encoder.
This device consists of a stage and controller that incorporate a uniquely developed linear encoder. The reading values from the stage's encoder have a resolution of 1nm to 100nm after amplification processing. The movable range is from 20mm to 300mm (the lineup varies depending on the resolution). The controller is equipped with a feedback circuit and motor driver, allowing for feedback control of the stage. It features various communication interfaces, enabling command control from a PC or similar devices. We also offer vacuum-compatible products. We have a track record of manufacturing wafer positioning stages tailored to the size of vacuum chambers.
- Company:シグマ光機
- Price:Other