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Reactor×アレイマジャパン - List of Manufacturers, Suppliers, Companies and Products

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Super Tall Single Wafer Reactor

Heater module for manufacturing a single wafer in the electronics and semiconductor industry!

Please consider not only conventional silicon device applications but also thermal processing applications for silicon-based power devices (IGBT) and annealing processes for compound semiconductors (GaN, SiC), as well as epitaxial growth equipment.

  • Other heaters
  • CVD Equipment
  • Annealing furnace

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