Heater module for manufacturing a single wafer in the electronics and semiconductor industry!
Please consider not only conventional silicon device applications but also thermal processing applications for silicon-based power devices (IGBT) and annealing processes for compound semiconductors (GaN, SiC), as well as epitaxial growth equipment.
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basic information
Semiconductor Wafer Single-Sheet Heat Treatment Heater Module □■Features■□ ■ Integrated module with excellent heat-resistant insulation material and disilicide molybdenum heater ■ High output capacity in a small space ■ Precise temperature control available ■ Type: SWR ■ Diameter (inches): 4, 5, 6, 8, 10 ■ Installation: Vertical or horizontal placement ■ Maximum heating element temperature: 1600 degrees ■ Output: 0.9W to 5.6kW ■ We can accommodate small quantities as well. Please contact us for more details.
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We have a proven track record as a batch thermal processing equipment manufacturer for semiconductor device manufacturers.
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Company information
We manufacture heating materials at our headquarters in Sweden and provide heating systems tailored to the needs of our Japanese customers by designing and manufacturing domestically. We have a domestic manufacturing base in Sakura City, Chiba Prefecture, where we process the final products and deliver them to our Japanese customers. By focusing on domestic design and manufacturing, we have established a system that ensures customer satisfaction with our response times and after-sales service.