Reproducing bipolar degradation through UV laser irradiation! Sample evaluation that normally takes 2 months can be completed in 2 days.
This product is a SiC defect inspection device that reveals defects that had not manifested without electrical current by using UV laser irradiation, thereby shortening the evaluation cycle of research and development.
【Features】
■ UV Irradiation
- Achieves uniform laser irradiation from small sizes like chips to the entire wafer.
- Calculates hole concentration from epitaxial thickness and doping concentration, and proposes radiation intensity corresponding to current density.
■ PL Measurement Function
- Observes defects from multiple angles at wavelengths of 380nm, 420nm, and over 700nm.
- Enables identification and classification of layered defects (buffer layer, drift layer, substrate interface) using image processing technology.
- Includes mapping function with coordinates of defect occurrence.
* Please feel free to consider a trial measurement (free of charge) first.
* For more details, please download the PDF or feel free to contact us.