FTIR Analyzer "MultiGas TM Purity"
High-sensitivity analyzer for bulk process gas analysis based on FTIR!
"MultiGas TM Purity" is an FTIR-based analyzer capable of detecting ppb-level impurities in high-purity bulk process gases. It excels in identifying impurities in bulk gases with high-resolution analysis. 【Features】 ■ Proven contribution to quality improvement in bulk gas manufacturing with gases such as NF3, NH3, and H2 ■ Configuration that accommodates corrosive high-purity gases ・Sample line and gas cell are made of welded 316SS ・Adopts a heated optical path to reduce contaminants from moisture and the atmosphere *For more details, please refer to the PDF document or feel free to contact us.
- Company:日本エム・ケー・エス
- Price:Other