Aera PI-980 Pressure-Insensitive MFC
Next-generation PI technology that meets tomorrow's process needs.
This groundbreaking technology platform improves responsiveness, gas flow stability, and measurement accuracy compared to conventional technologies, demonstrating excellent performance in real-time process control. Its superior flow stability enhances process reproducibility between chambers and improves production yield. The PI-980 series reduces the need for expensive gas panel components traditionally used in conventional thermal structures by integrating pressure sensors, temperature sensors, and our proprietary NeuralStep control technology. Additionally, the multi-gas, multi-range functionality dramatically reduces the need for spare inventory, further contributing to cost efficiency. This next-generation MFC technology, combined with the integrated diagnostic capabilities and the platform of our proven D980 series products in the field, enhances equipment uptime and enables rapid and easy troubleshooting.
- Company：日立Astemo＆ナガノ
- Price：Other
