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Flow Controller "MODEL 2203 SERIES"

Excellent control performance with a non-rotating structure! Introducing our secondary pressure fluctuation type gas flow controller.

The "MODEL 2412D SERIES" is a product that can maintain a constant flow rate against pressure fluctuations on the outlet side (secondary side). It features a non-rotating structure with excellent control performance, and the maximum operating pressure is 0.8 MPa(G). The adjustment screw rotation is approximately 12 turns. Additionally, the maximum operating temperature is 60°C. Please feel free to contact us when you need assistance. 【Standard Specifications (Partial)】 ■ Applicable fluids: N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate (Air at 20°C): 10 mL/min to 20 L/min ■ Control accuracy: Variation within 1% of the indicated value against load pressure fluctuations (with an inlet-outlet differential pressure of 0.05 MPa or more) ■ Adjustment screw rotation: Approximately 12 turns ■ Maximum operating pressure: 0.8 MPa(G) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Flow Controller "MODEL 2600-PPS SERIES"

Controllable from minimal flow! Introducing our liquid flow controllers.

The "MODEL 2600-PPS SERIES" is a product that can maintain a constant flow rate against pressure fluctuations. The materials for the fluid contact parts are PPS (30% glass-filled), SUS316, FKM, FFKM, and PTFE, with a usage temperature of 15 to 50°C. Additionally, the operating pressure is 0.1 to 0.5 MPa(G), and it can control from micro flow rates. Please feel free to contact us when you need assistance. 【Standard Specifications (Partial)】 ■ Target Fluid: H2O ■ Flow Rate Ratings: 1–10 mL/min, 10–100 mL/min, 50–500 mL/min, 0.1–1 L/min ■ Control Accuracy: Within ±3% F.S. (provided the liquid temperature is constant) ■ Operating Differential Pressure: 0.1 MPa or more ■ Operating Pressure: 0.1–0.5 MPa(G) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Flow Controller "MODEL 2204 SERIES"

Non-rotating structure! Primary pressure fluctuation type gas flow controller with excellent control performance.

The "MODEL 2204 SERIES" is a product designed for gases such as N2, Air, H2, He, Ar, O2, and CO2. It features a non-rotating structure with excellent control performance, capable of maintaining a constant flow rate in response to pressure fluctuations on the inlet side (primary side). Additionally, the maximum flow rate (Air at 20°C) ranges from 10 mL/min to 10 L/min, and the maximum operating pressure is 0.8 MPa(G). 【Standard Specifications (Partial)】 ■ Target fluids: N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate (Air at 20°C): 10 mL/min to 10 L/min ■ Control accuracy: Within ±2% of the indicated value for a pressure change of 0.3 MPa between inlet pressures of 0.07 to 0.8 MPa ■ Adjustment screw rotation: Approximately 12 turns ■ Maximum operating pressure: 0.8 MPa(G) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Flow Controller "MODEL 2600-S SERIES"

Operating temperature is 15 to 35°C! A liquid flow controller that can maintain a constant flow rate against pressure fluctuations.

The "MODEL 2600-S SERIES" is a product that can control very small flow rates. The target fluid is H2O, and it is capable of maintaining a constant flow rate against pressure fluctuations. Additionally, the flow rate ratings are 1–10 mL/min, 10–100 mL/min, 50–500 mL/min, and 0.1–1 L/min. 【Standard Specifications (Partial)】 ■ Target Fluid: H2O ■ Flow Rate Ratings: 1–10 mL/min, 10–100 mL/min, 50–500 mL/min, 0.1–1 L/min ■ Control Accuracy: Within ±3% F.S. (provided that the liquid temperature is constant) ■ Operating Differential Pressure: 0.1 MPa or more ■ Operating Pressure: 0.1–0.5 MPa (G) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Mass Flow Controller MODEL 8700/3660 SERIES

It is less affected by temperature and pressure, allowing for high-precision flow measurement and control! Gases such as N2, Air, H2, He, and Ar are the targets.

We would like to introduce our mass flow controllers, the 'MODEL 8700/3660 SERIES'. The mass flow controller/indicator "MODEL 8700 SERIES" features analog input/output of 0-5VDC (which can be changed to 4-20mA) and offers various functions such as instantaneous/integrated flow display and alarm settings. The standard mass flow controller "MODEL 3660 SERIES" accommodates a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, equivalent to N2. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM equivalent to N2) ■ Analog input/output can be changed via the display (MODEL 8700 SERIES) *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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PI Mass Flow Controller "MODEL ST-500"

Metal seal MFC with diaphragm-type valve! Compatible with corrosive fluids due to EP treatment and oxidation film treatment.

The "MODEL ST-500 SERIES" is a mass flow controller equipped with PI functionality (Pressure Insensitive). It features a pressure sensor installed before the flow sensor, which captures pressure fluctuations and compares them to the pressure before the fluctuation, allowing for real-time adjustments to the valve opening. This enables stable flow control in response to pressure variations. It is suitable for gas supply processes that require stability and accuracy, such as semiconductor manufacturing equipment. 【Features】 ■ Stable flow control in response to pressure fluctuations (only for ST-500) ■ Supports DeviceNet, EtherCAT, and RS485 (only for ST-550) ■ Compatible with IGS W seal fittings ■ High-precision measurement control with S.P. accuracy, response time within 1 second across the entire flow control range ■ Multi-range function via a dedicated app (30-100% F.S.) *For more details, please download the PDF or feel free to contact us.

  • Flow Control

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