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Metal parts and polymer parts produced by the ultra-fine processing LIGA process.

An aspect ratio of 100 is also possible. We provide high-precision, high-aspect-ratio micro parts and sub-micro parts. Numerous applications in the field of X-ray optics.

The LIGA process is a composite process for manufacturing fine structures with a high aspect ratio. Through X-ray lithography and electroforming, it achieves fine structures made of metals and polymers with high precision, a high aspect ratio (around 100), smooth sidewalls (<50 nm), and free lateral shapes for metal structures and resist structures. Application examples: - X-ray diffraction gratings for Talbot interferometers (introduced in research institutes and industries around the world, including Japan) - X-ray focusing lenses (focusing lenses for synchrotron facilities, monochromatic light) - Micro gears - Honeycomb mesh structures - Fine through-hole structures (used as apertures for beams, including X-rays)

  • Other molds
  • Other semiconductor manufacturing equipment
  • Other optical parts

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Microgear high aspect ratio metal parts through ultra-fine processing.

An aspect ratio of 100 is also possible. High precision and high aspect ratio micro metal parts.

■ Manufacturing Process: LIGA Process This is a composite process that achieves fine structures with a high aspect ratio. Using X-ray lithography and electroforming, fine structures made of metals or polymers are realized with high precision and a high aspect ratio. ■ Micro Gear Example 1 Harmonic drive gear (for high-precision micromanipulators, high-speed transmission ratio, no backlash) Structural height: 1,100 µm, structural width: 30 µm ■ Micro Gear Example 2 (Injection Molding Mold) An example of a high-precision parallel structure with a high aspect ratio. Nickel micro gear array (mold for resin injection molded parts). Structure: height 2,000 µm, gear structural width: 35 µm

  • gear
  • Other molds
  • Contract manufacturing

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